Bottom-up assembly of large-area nanowire resonator arrays.

Directed-assembly of nanowire-based devices will enable the development of integrated circuits with new functions that extend well beyond mainstream digital logic. For example, nanoelectromechanical resonators are very attractive for chip-based sensor arrays because of their potential for ultrasensitive mass detection. In this letter, we introduce a new bottom-up assembly method to fabricate large-area nanoelectromechanical arrays each having over 2,000 single-nanowire resonators. The nanowires are synthesized and chemically functionalized before they are integrated onto a silicon chip at predetermined locations. Peptide nucleic acid probe molecules attached to the nanowires before assembly maintain their binding selectivity and recognize complementary oligonucleotide targets once the resonator array is assembled. The two types of cantilevered resonators we integrated here using silicon and rhodium nanowires had Q-factors of approximately 4,500 and approximately 1,150, respectively, in vacuum. Taken together, these results show that bottom-up nanowire assembly can offer a practical alternative to top-down fabrication for sensitive chip-based detection.

[1]  Ling Pan,et al.  Use of phosphine as an n-type dopant source for vapor-liquid-solid growth of silicon nanowires. , 2005, Nano letters.

[2]  H. Craighead.  Nanoelectromechanical systems. , 2000, Science.

[3]  C. Lieber,et al.  Nanowire Nanosensors for Highly Sensitive and Selective Detection of Biological and Chemical Species , 2001, Science.

[4]  P. A. Smith,et al.  Electric-field assisted assembly and alignment of metallic nanowires , 2000 .

[5]  J. Bibette,et al.  Self-assembled magnetic nanowires made irreversible by polymer bridging. , 2005, Langmuir : the ACS journal of surfaces and colloids.

[6]  T. Mallouk,et al.  Electrochemical Growth of Single-Crystal Metal Nanowires via a Two-Dimensional Nucleation and Growth Mechanism. , 2003, Nano letters.

[7]  C. Vittoria,et al.  Self-assembled magnetic nanowire arrays , 2006, INTERMAG 2006 - IEEE International Magnetics Conference.

[8]  M. Roukes,et al.  Zeptogram-scale nanomechanical mass sensing. , 2005, Nano letters.

[9]  R. Blevins,et al.  Formulas for natural frequency and mode shape , 1984 .

[10]  S. A. Schaaf,et al.  Flow of rarefied gases , 1961 .

[11]  M. Roukes,et al.  Ultra-sensitive NEMS-based cantilevers for sensing, scanned probe and very high-frequency applications. , 2007, Nature nanotechnology.

[12]  Peidong Yang,et al.  One-step patterning of aligned nanowire arrays by programmed dip coating. , 2007, Angewandte Chemie.

[13]  M. Roukes.  Nanoelectromechanical Systems , 2000, cond-mat/0008187.

[14]  T. Mayer,et al.  Template-grown metal nanowires as resonators: performance and characterization of dissipative and elastic properties. , 2007, Nano letters.

[15]  Panos G. Datskos,et al.  Performance of uncooled microcantilever thermal detectors , 2004 .

[16]  A. Zehnder,et al.  Thermomechanical transitions in doubly-clamped micro-oscillators , 2007 .

[17]  Z. J. Wang,et al.  Effect of fluids on the Q factor and resonance frequency of oscillating micrometer and nanometer scale beams. , 2004, Physical review. E, Statistical, nonlinear, and soft matter physics.

[18]  Charles M. Lieber,et al.  Directed assembly of one-dimensional nanostructures into functional networks. , 2001, Science.

[19]  Rebecca L. Stoermer,et al.  Silica-coated, Au/Ag striped nanowires for bioanalysis. , 2007, Langmuir : the ACS journal of surfaces and colloids.

[20]  Dongmok Whang,et al.  Large-scale hierarchical organization of nanowire arrays for integrated nanosystems , 2003 .

[21]  E. Anastassakis,et al.  Elastic properties of textured diamond and silicon , 2001 .

[22]  Younan Xia,et al.  Template-assisted self-assembly: a practical route to complex aggregates of monodispersed colloids with well-defined sizes, shapes, and structures. , 2001, Journal of the American Chemical Society.

[23]  W. Fang,et al.  Determining mean and gradient residual stresses in thin films using micromachined cantilevers , 1996 .

[24]  A. Boisen,et al.  Aluminum nano-cantilevers for high sensitivity mass sensors , 2005, 5th IEEE Conference on Nanotechnology, 2005..

[25]  P. McEuen,et al.  A tunable carbon nanotube electromechanical oscillator , 2004, Nature.

[26]  M. Sepaniak,et al.  Cantilever transducers as a platform for chemical and biological sensors , 2004 .

[27]  J. Boland,et al.  A generalized description of the elastic properties of nanowires. , 2006, Nano letters.

[28]  Christine D. Keating,et al.  Striped Metal Nanowires as Building Blocks and Optical Tags , 2003 .

[29]  Axel Scherer,et al.  Nanowire-Based Very-High-Frequency Electromechanical Resonator , 2003 .

[30]  V. Vaughan.  THE HARVEY LECTURES FOR 1905-6 , 1907 .

[31]  Gengfeng Zheng,et al.  Multiplexed electrical detection of cancer markers with nanowire sensor arrays , 2005, Nature Biotechnology.

[32]  Devrez Mehmet Karabacak,et al.  Diffraction effects in optical interferometric displacement detection in nanoelectromechanical systems , 2005 .

[33]  Younan Xia,et al.  One‐Dimensional Nanostructures: Synthesis, Characterization, and Applications , 2003 .