An XYZ Micromanipulator with three translational degrees of freedom
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[1] Richard S. Muller,et al. Improved surface-micromachined hinges for fold-out structures , 1998 .
[2] P. Zweifel. Advanced Mathematical Methods for Scientists and Engineers , 1980 .
[3] Kristofer S. J. Pister,et al. MICRO-OPTO-ELECTRO-MECHANICAL DEVICES AND ON-CHIP OPTICAL PROCESSING , 1997 .
[4] Lung-Wen Tsai,et al. A Parallel Manipulator with Only Translational Degrees of Freedom , 1997 .
[5] W. Chung,et al. Kinematic condition analysis of three-DOF pure translational parallel manipulators , 2003 .
[6] J. Sniegowski,et al. IC-Compatible Polysilicon Surface Micromachining , 2000 .
[7] Kristofer S. J. Pister,et al. Surface-micromachined components for articulated microrobots , 1996 .
[8] R.W. Tkach,et al. Micromachined optical-switching technologies for WDM networks , 1999, 1999 Digest of the LEOS Summer Topical Meetings: Nanostructures and Quantum Dots/WDM Components/VCSELs and Microcavaties/RF Photonics for CATV and HFC Systems (Cat. No.99TH8455).
[9] M.C. Wu,et al. Out-of-plane refractive microlens fabricated by surface micromachining , 1996, IEEE Photonics Technology Letters.
[10] M. Gretillat,et al. Vertical mirrors fabricated by deep reactive ion etching for fiber-optic switching applications , 1997 .
[11] M.C. Wu,et al. Device transplant of optical MEMS for out of plane beam steering , 2001, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090).
[12] Larry L. Howell,et al. Force Relationships for an XYZ Micromanipulator With Three Translational Degrees of Freedom , 2004 .
[13] Lung-Wen Tsai,et al. Robot Analysis and Design: The Mechanics of Serial and Parallel Manipulators , 1999 .
[14] L. W. Tsai,et al. Robot Analysis: The Mechanics of Serial and Parallel Ma-nipulators , 1999 .
[15] Y. W. Yi,et al. Magnetic actuation of hinged microstructures , 1999 .
[16] J. Margail,et al. 1/spl times/8 micro-mechanical switches based on moving waveguides for optical fiber network switching , 2000, 2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399).
[17] S. S. Lee,et al. Surface‐micromachined free‐space micro‐optical systems containing three‐dimensional microgratings , 1995 .
[18] WU MINGC.. Micromachining for Optical and Optoelectronic Systems , 1998 .
[19] Kristofer S. J. Pister,et al. Micro-machined three-dimensional micro-optics for integrated free-space optical system , 1994, IEEE Photonics Technology Letters.
[20] R.T. Chen,et al. A high-speed low-voltage stress-induced micromachined 2 x 2 optical switch , 1999, IEEE Photonics Technology Letters.