Proceedings, IEEE the Thirteenth Annual International Conference on Micro Electro Mechanical Systems : Miyazaki, Japan, January 23-27, 2000

Intelligent CMOS Sensors Commercialization Challenges of MEMs Ball Semicondutor Technology and its Application to MEMs Electrostatic Actuators Piezoelectric Actuators Fluidics Handling Sensors Applications Modelling and Design Materials and Metrology Bonding and Packaging Novel Tecnologies. (Part contents)