Cavity piezooptomechanics: Piezoelectrically excited, optically transduced optomechanical resonators

We present a monolithic integrated aluminum nitride (AlN) optomechanical resonator in which the mechanical motion is actuated by piezoelectric force and the displacement is transduced by a high-Q optical cavity. The AlN optomechanical resonator is excited from a radio-frequency electrode via a small air gap to eliminate resonator-to-electrode loss. We observe the electrically excited mechanical motion at 47.3 MHz, 1.04 GHz, and 3.12 GHz, corresponding to the 1st, 2nd, and 4th radial-contour mode of the wheel resonator, respectively. An equivalent circuit model is developed to describe the observed Fano-like resonance spectrum.

[1]  C. Xiong,et al.  A superhigh-frequency optoelectromechanical system based on a slotted photonic crystal cavity , 2012, CLEO: 2013.

[2]  C. Xiong,et al.  Integrated high frequency aluminum nitride optomechanical resonators , 2012, 1204.4203.

[3]  S. Bhave,et al.  1.12GHz Opto-Acoustic Oscillator , 2012, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS).

[4]  C. Xiong,et al.  High-Q aluminum nitride photonic crystal nanobeam cavities , 2012, 1205.1405.

[5]  O. Painter,et al.  A chip-scale integrated cavity-electro-optomechanics platform. , 2011, Optics express.

[6]  Chi Xiong,et al.  GHz optomechanical resonators with high mechanical Q factor in air. , 2011, Optics express.

[7]  T. Mcrae,et al.  Cavity optoelectromechanical regenerative amplification. , 2011, Optics express.

[8]  M. Aspelmeyer,et al.  Laser cooling of a nanomechanical oscillator into its quantum ground state , 2011, Nature.

[9]  S. Bhave,et al.  Electrostatic actuation of silicon optomechanical resonators. , 2010, Optics express.

[10]  W. Bowen,et al.  Cavity optoelectromechanical system combining strong electrical actuation with ultrasensitive transduction , 2010, 1005.4974.

[11]  Sebastien Hentz,et al.  Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films , 2009 .

[12]  Joachim Knittel,et al.  Cooling and control of a cavity optoelectromechanical system. , 2009, Physical review letters.

[13]  T. Kippenberg,et al.  Resolved-sideband cooling and position measurement of a micromechanical oscillator close to the Heisenberg uncertainty limit , 2009 .

[14]  T. Baehr‐Jones,et al.  Harnessing optical forces in integrated photonic circuits , 2008, Nature.

[15]  Kerry Vahala,et al.  Cavity opto-mechanics. , 2007, Optics express.

[16]  A. Pisano,et al.  Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators , 2006, Journal of Microelectromechanical Systems.

[17]  S. Mancini,et al.  Scheme for teleportation of quantum states onto a mechanical resonator. , 2003, Physical review letters.

[18]  John D. Larson,et al.  Thin film bulk wave acoustic resonators (FBAR) for wireless applications , 2001, 2001 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.01CH37263).