Infrared absorption of hydrogenated amorphous SiC and GeC films

Abstract We have observed and assigned the main IR absorption bands of Si x C 1− x H z and Ge x C 1− x H z films produced with an r.f. glow discharge. The influence of neighbouring atoms on the frequency of SiH and CH bond stretching vibrations was determined. Agreement between observed and calculated frequency shifts was obtained for Si x C 1− x H z films.