Note: Development of a microfabricated sensor to measure thermal conductivity of picoliter scale liquid samples.

This paper presents a thermal analysis device, which can measure thermal conductivity of picoliter scale liquid sample. We employ the three omega method with a microfabricated AC thermal sensor with nanometer width heater. The liquid sample is confined by a micro-well structure fabricated on the sensor surface. The performance of the instrument was verified by measuring the thermal conductivity of 27-picoliter samples of de-ionized (DI) water, ethanol, methanol, and DI water-ethanol mixtures with accuracies better than 3%. Furthermore, another analytical scheme allows real-time thermal conductivity measurement with 5% accuracy. To the best of our knowledge, this technique requires the smallest volume of sample to measure thermal property ever.

[1]  Srinivas Tadigadapa,et al.  Thermal characterization of liquids and polymer thin films using a microcalorimeter , 2005 .

[2]  Note: Three-omega method to measure thermal properties of subnanoliter liquid samples. , 2010, The Review of scientific instruments.

[3]  Seungmin Lee,et al.  Heat capacity measurement of dielectric solids using a linear surface heater: Application to ferroelectrics , 1994 .

[4]  Yong Xu,et al.  A MEMS Thermal Biosensor for Metabolic Monitoring Applications , 2008, Journal of Microelectromechanical Systems.

[5]  Dongsik Kim,et al.  3omega method to measure thermal properties of electrically conducting small-volume liquid. , 2007, The Review of scientific instruments.

[6]  D. Cahill.  Thermal conductivity measurement from 30 to 750 K: the 3ω method , 1990 .

[7]  P. Johansson,et al.  A novel thermal biosensor: evaluation for determination of urea in serum , 1998 .

[8]  T. Choi,et al.  Thermal conductivity of bovine serum albumin: A tool to probe denaturation of protein , 2011 .

[9]  Dongsik Kim,et al.  Real-time thermal characterization of 12 nl fluid samples in a microchannel. , 2008, The Review of scientific instruments.

[10]  S. Tadigadapa,et al.  A novel immunosensing technique based on the thermal properties of biochemicals , 2005, IEEE Sensors, 2005..

[11]  V. Baier,et al.  Nano-calorimetry of small-sized biological samples , 2008 .

[12]  Jean-Luc Garden,et al.  Highly sensitive ac nanocalorimeter for microliter-scale liquids or biological samples , 2004 .

[13]  S. Kwun,et al.  The 3ω technique for measuring dynamic specific heat and thermal conductivity of a liquid or solid , 1996 .

[14]  J. Garden,et al.  Physical kinetics and thermodynamics of phase transitions probed by dynamic nanocalorimetry , 2005 .

[15]  B. Wunderlich,et al.  Heat Capacity and Other Thermodynamic Properties of Linear Macromolecules VI. Acrylic Polymers , 1982 .

[16]  Thermal conductivity measurement under hydrostatic pressure using the 3ω method , 2004 .

[17]  Jonathan M. Cooper,et al.  Heat conduction nanocalorimeter for pl-scale single cell measurements , 2002 .

[18]  J. Lepock.  Measurement of protein stability and protein denaturation in cells using differential scanning calorimetry. , 2005, Methods.

[19]  Lin Rui-sen,et al.  Thermal conductivities of some organic solvents and their binary mixtures , 1997 .