Silicon microchambers for DNA amplification

Microchambers have been fabricated in silicon by bulk micromachining using anisotropic wet etching. Rapid temperature cycling and control at low power is achieved using a special thermal design of the chambers, combined with thin film platinum resistors as temperature sensors and heaters. The chambers have been used for the polymerase chain reaction (PCR) in order to amplify DNA. Rapid temperature cycling and small size are promising attributes for portable high efficiency analytical systems.

[1]  Kurt E. Petersen,et al.  From microsensors to microinstruments , 1996 .

[2]  D. Garling,et al.  Minimizing the time required for DNA amplification by efficient heat transfer to small samples. , 1990, Analytical Biochemistry.

[3]  A. R. Kaiser,et al.  Microfabricated structures for integrated DNA analysis. , 1996, Proceedings of the National Academy of Sciences of the United States of America.

[4]  G. Stemme,et al.  Thermal characterization of surface-micromachined silicon nitride membranes for thermal infrared detectors , 1997 .

[5]  M. A. Northrup,et al.  A Mems-based Miniature DNA Analysis System , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[6]  L J Kricka,et al.  Chip PCR. I. Surface passivation of microfabricated silicon-glass chips for PCR. , 1996, Nucleic acids research.

[7]  A. Manz,et al.  Miniaturized total chemical analysis systems: A novel concept for chemical sensing , 1990 .

[8]  Ulrich Dillner,et al.  Chip elements for fast thermocycling , 1997 .

[9]  D. J. Harrison,et al.  Planar chips technology for miniaturization and integration of separation techniques into monitoring systems. Capillary electrophoresis on a chip , 1992 .

[10]  Jens Anders Branebjerg,et al.  Microfluidics-a review , 1993 .

[11]  Masayoshi Esashi,et al.  Recent Developments in Integrated Chemical Analyzing Systems , 1994 .

[12]  T. B. Taylor,et al.  Optimization of the performance of the polymerase chain reaction in silicon-based microstructures. , 1997, Nucleic acids research.

[13]  M. A. Northrup,et al.  Functional integration of PCR amplification and capillary electrophoresis in a microfabricated DNA analysis device. , 1996, Analytical chemistry.

[14]  R. Gibbs.  DNA amplification by the polymerase chain reaction. , 1990, Analytical chemistry.