论文信息 - N2 doped SiO2–SiON planar waveguides deposited by PECVD method - 字舞流文

N2 doped SiO2–SiON planar waveguides deposited by PECVD method

D. Yoon | Sungkoo Cho | H. Lee | Youn-Jea Kim | H. Yoon

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