论文信息 - Acoustic near-field conditions in an ESEM/AFM hybrid system

Acoustic near-field conditions in an ESEM/AFM hybrid system

The local distribution of acoustic waves generated by a locally modulated electron beam is investigated in a hybrid system consisting of an Environmental Scanning Electron Microscope (ESEM) and an Atomic Force Microscope (AFM). Depending on the modulation, different acoustic source characteristics with different near-field conditions are generated which can be used in acoustic near-field techniques, for example to detect ferroelectric domain structures.

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