Phase-Noise Reduction in a CMOS-MEMS Oscillator Under Nonlinear MEMS Operation

In this paper, we will present an all-CMOS oscillator based on monolithically integrated MEMS resonators fabricated from the VIA layer (tungsten) of a <inline-formula> <tex-math notation="LaTeX">$0.35~\mu \text{m}$ </tex-math></inline-formula> CMOS technology process. With this CMOS MEMS closed-loop system, the nonlinear MEMS frequency response due to the electrostatic actuation has been reconstructed. Using a phase-controlled closed-loop the frequency stability of the self-sustained oscillator at different nonlinear operation points has been analyzed, showing an optimal point belonging to the unstable region of the MEMS resonator.

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