Miniature Single-Disk Viscous Pump "Single-DVP…, Performance

The development and testing of a rotating single-disk viscous pump are described. This pump consists of a 10.16 mm diameter spinning disk, and a pump chamber, which are separated by a small gap that forms the fluid passage. The walls of the pump chamber form a C-shaped channel with an inner radius of 1.19 mm, an outer radius of 2.38 mm, and a depth of 40, 73, 117, or 246 μm. Fluid inlet and outlet ports are located at the ends of the C-shaped channel. Experimental flow rate and pressure rise data are obtained for rotational speeds from 100 to 5000 rpm, fluid chamber heights from 40 to 246 μm, flow rates from 0 to 4.75 ml/min, pressure rises from 0 to 31.1 kPa, and fluid viscosities from 1 to 62 mPa s. An analytical expression for the net flow rate and pressure rise, as dependent on the fluid chamber geometry, disk rotational speed, and fluid viscosity, is derived and found to agree with the experimental data. The flow rate and pressure rise of the pump vary nearly linearly with rotational speed. The volumetric flow rate does not change significantly with changes in fluid viscosity for the same rotational speed and pumping circuit. Advantages of the disk pumps include simplicity, ease of manufacture, ability to produce continuous flow with a flow rate that does not vary significantly in time, and ability to pump biological samples without significant alteration or destruction of cells, protein suspension, or other delicate matter.

[1]  Nam-Trung Nguyen,et al.  Miniature valveless pumps based on printed circuit board technique , 2001 .

[2]  H. Kahn,et al.  Thin-film shape-memory alloy actuated micropumps , 1998 .

[3]  S. Jeanneret,et al.  Integrated flow-regulated silicon micropump , 1994 .

[4]  H. Mizoguchi,et al.  Design and fabrication of light driven micropump , 1992, [1992] Proceedings IEEE Micro Electro Mechanical Systems.

[5]  J. Santiago,et al.  Fabrication and characterization of electrokinetic micro pumps , 2000, ITHERM 2000. The Seventh Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (Cat. No.00CH37069).

[6]  W. Benecke,et al.  Microfabricated electrohydrodynamic (EHD) pumps for liquids of higher conductivity , 1992 .

[7]  Yong-Kweon Kim,et al.  Fabrication and experiment of a planar micro ion drag pump , 1998 .

[8]  J.-H. Tsai,et al.  A thermal bubble actuated micro nozzle-diffuser pump , 2001, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090).

[9]  C. Cabuz,et al.  The dual diaphragm pump , 2001, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090).

[10]  S. D. Collins,et al.  Flexural-plate-wave actuators based on PZT thin film , 1997, Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.

[11]  H. G. Elrod Some refinements of the theory of the viscous screw pump. , 1973 .

[12]  Wolfgang Ehrfeld,et al.  Micro gear pumps for dosing of viscous fluids , 1997 .

[13]  Andrea Prosperetti,et al.  Bubble-based micropump for electrically conducting liquids , 2001 .

[14]  Liwei Lin,et al.  A thermal-bubble-actuated micronozzle-diffuser pump , 2002 .

[15]  Göran Stemme,et al.  A valve-less planar fluid pump with two pump chambers , 1995 .

[16]  Itzhak Green,et al.  Analysis and Optimization of Semicircular and Straight Lobe Viscous Pumps , 1992 .

[17]  Y. Tai,et al.  A check-valved silicone diaphragm pump , 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308).

[18]  Samuel P. Kounaves,et al.  Fabrication and characterization , 1991 .

[19]  Mark G. Allen,et al.  Fluid micropumps based on rotary magnetic actuators , 1995, Proceedings IEEE Micro Electro Mechanical Systems. 1995.

[20]  Sonny H. Winoto,et al.  ANALYSIS AND TEST OF A VISCOUS PUMP WITH RADIAL PUMPING GROOVES , 1994 .

[21]  Nesbitt W. Hagood,et al.  Design, fabrication, and testing of a piezoelectrically driven high flow rate micro-pump , 2000, ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on Applications of Ferroelectrics (IEEE Cat. No.00CH37076).

[22]  P. Yager,et al.  A ferrofluidic magnetic micropump , 2001 .

[23]  Mohamed Gad-el-Hak,et al.  A Novel Pump for MEMS Applications , 1996 .

[24]  Renshi Sawada,et al.  Fabrication of fluorinated polyimide microgrids using magnetically controlled reactive ion etching (MC-RIE) and their applications to an ion drag integrated micropump , 1996 .

[25]  S. H. Hasinger,et al.  Investigation of a Shear-Force Pump , 1963 .

[26]  Wanjun Wang,et al.  LIGA fabrication and test of a DC type magnetohydrodynamic (MHD) micropump , 2000 .

[27]  Yousef Haik,et al.  Design and Analysis of a Surface Micromachined Spiral-Channel Viscous Pump , 2003 .

[28]  M. Gad-el-Hak,et al.  Micro Flows: Fundamentals and Simulation , 2002 .

[29]  H. A. Arafa,et al.  Hydrostatic bearings with multiport viscous pumps , 2003 .

[30]  N. Nguyen,et al.  Fundamentals and Applications of Microfluidics , 2002 .

[31]  Yuichi Sato,et al.  Performance Characteristics of Shrouded Rayleigh-Step and Spiral Groove Viscous Pumps , 1992 .

[32]  Klaus Hofmann,et al.  A micromachined electrohydrodynamic (EHD) pump , 1991 .

[33]  R. J. Moffat,et al.  Contributions to the Theory of Single-Sample Uncertainty Analysis , 1982 .

[34]  I. Etsion,et al.  Performance Analysis of a New Concept Viscous Pump , 1988 .

[35]  Mohamed Gad-el-Hak,et al.  Navier-Stokes Simulations of a Novel Viscous Pump , 1997 .