Uv-Induced Photodeposition Of Fe Films From Iron Carbonyl

We present results on the 77K photodecomposition of Fe(C0)5 to produce Fe films using synchrotron and excimer laser radiation. Analysis of these films included in situ photon-stimulated ion desorption (PSID) and total electron yield (TEY) spectroscopies, and ex situ Auger electron spectroscopy (AES), scanning electron microscopy (SEM), X-ray fluorescence, and resistivity measurements. For the films grown using synchrotron radiation, the various ion products were identified and their intensities monitored during photolysis. For the films grown using excimer laser radiation, appropriate laser power densities and Fe(C0)5 pressures produced adherent metallic films which contained less than 13 atomic % oxygen and carbon contamination.