Joining of transparent materials by femtosecond laser pulses

When a femtosecond laser pulse is focused at the interface of two transparent substrates, localized melting and quenching of the two substrates occur around the focal volume due to nonlinear absorption. The substrates can then be joined by resolidification of the materials. We demonstrate the joining of similar and dissimilar glass substrates using a 1-kHz 800-nm Ti:sapphire amplifier. We investigated the laser parameter to join transparent substrates and characterized the joint strength and the transmittance through joint volumes.

[1]  H. Smith.  Optical‐Contact Bonding , 1965 .

[2]  P. Carr.  Reflection of Gigacycle‐per‐Second Ultrasonic Waves from an Optical‐Contact Bond , 1965 .

[3]  Phillip W. Barth,et al.  Silicon fusion bonding for fabrication of sensors, actuators and microstructures , 1990 .

[4]  F. Tay,et al.  Localized laser assisted eutectic bonding of quartz and silicon by Nd:YAG pulsed-laser , 2005 .

[5]  K. Itoh,et al.  Laser micro-welding of transparent materials by a localized heat accumulation effect using a femtosecond fiber laser at 1558 nm. , 2006, Optics express.

[6]  J. Nishii,et al.  Space-selective laser joining of dissimilar transparent materials using femtosecond laser pulses , 2006 .

[7]  J. Nishii,et al.  In situ observation of photoinduced refractive-index changes in filaments formed in glasses by femtosecond laser pulses. , 2001, Optics letters.

[8]  C. Schaffer,et al.  Three-dimensional micromachining inside transparent materials using femtosecond laser pulses: New applications , 2006, 2006 Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference.

[9]  K. Itoh,et al.  Direct joining of glass substrates by 1 kHz femtosecond laser pulses , 2007 .

[10]  T. Rogers,et al.  Selection of glass, anodic bonding conditions and material compatibility for silicon-glass capacitive sensors , 1995 .

[11]  I. Hsing,et al.  Detailed characterization of anodic bonding process between glass and thin-film coated silicon substrates , 2000 .

[12]  Kazuyoshi Itoh,et al.  Anisotropic refractive-index change in silica glass induced by self-trapped filament of linearly polarized femtosecond laser pulses , 2003 .

[13]  S. Shoji,et al.  Studies on SiO2–SiO2 bonding with hydrofluoric acid. Room temperature and low stress bonding technique for MEMS , 2000 .

[14]  J. Nishii,et al.  Welding of Transparent Materials Using Femtosecond Laser Pulses , 2005 .

[15]  Reinhart Poprawe,et al.  Locally selective bonding of silicon and glass with laser , 2001 .

[16]  Kazuyoshi Itoh,et al.  Volume Grating Induced by a Self-Trapped Long Filament of Femtosecond Laser Pulses in Silica Glass , 2003 .