Noncontact microtorque measurement for motors in MEMS

An important performance criterion for practicable microactuators is the value of output torque. For the torque to be measured is very small, the influence of frictional force and other factors on testing are difficult avoided. So a new noncontact and direct experimental method was proposed, the basic theory and a simple and low-cost design of the measuring instrument is described in this paper. The testing range of shaft torque is from 10-4Nm to 10-7.