Research on precise traveling positioning stage driven by piezoelectric bimorph

Driven by piezoelectric bimorph actuator,a new precise positioning stage run in two directions within a horizontal plane was presented.Based on the analysis of the working principle of stick-slip mechanism,a mathematical model describing its dynamic behavior was set up and simulated,experiments of traveling performance and bearing ability on the prototype were conducted.The results show that the designed stage has the advantages in simple structure,small volume,light weight,stable step size and large working range.As the driving voltage is below 30 V,the step error is less than 0.5μm.The bearing ability of the stage is approximately 7～8 times its own mass.