Trajectory effects in multiply charged ion-surface interactions

Ar ions of 4.3 keV qin were scattered at large angles (θ=75°) from a clean oriented surface. By selecting Ar projectiles having a large ionization potential and by using a large scattering angle only ions scattered at the first atomic layer of the surface were detected. Scattered ion energy spectra show peaks of single scattering and double scattering of the Ar projectile ions from one or two surface Au atoms, and the distribution attributed to double collisions splits into two peaks when the scattering plane coincides with a crystallographic plane. Simulations with a MARLOWE code allowed for interpretation of the structure in the double collision peak by in-plane and zig-zag double collisions. Differences in the relative peak heights between the experiment and a MARLOWE simulation were partly explained by different neutralization probabilities with varying trajectories. Yield changes with increasing charge states show interesting possibilities for future experiments with highly charged ions.