Sub-50 nm half-pitch imaging with a low activation energy chemically amplified photoresist
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Martha I. Sanchez | Gregory M. Wallraff | William D. Hinsberg | Frances A. Houle | Dario L. Goldfarb | John A. Hoffnagle | Phillip J. Brock | Blake Davis | David R. Medeiros | Karen Petrillo | Wu-Song Huang | Carl E. Larson | Linda K. Sundberg | J. J. Bucchignano | Charles T. Rettner | C. Rettner | S. Wind | G. Wallraff | W. Hinsberg | K. Petrillo | F. Houle | J. Bucchignano | Wu-Song Huang | J. Hoffnagle | L. Sundberg | M. Sanchez | P. Brock | C. Larson | D. Goldfarb | S. Wind | Karen Temple | K. Temple | D. R. Medeiros | B. Davis
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