Silicon-on-insulator (SOI) phased-array wavelength multi/demultiplexer with extremely low-polarization sensitivity

We demonstrate the first phased-array wavelength multiplexer fabricated in the silicon-on-insulator (SOI) waveguide technology. The four-channel wavelength division multiplexer (WDM) has a channel spacing of 1.9 nm centered at 1550-nm wavelength and a 3-dB channel bandwidth of 0.72 nm. The crosstalk to neighboring channels is less than -22 dB and the on-chip insertion loss is below 6 dB for all channels. The TE-TM shift is less than 0.04 nm which is the smallest attained without compensation techniques in any integrated optic technology.

[1]  A. Levi,et al.  Si-based receivers for optical data links , 1994 .

[2]  Klaus Petermann,et al.  Concepts for optical waveguide switches in silicon , 1995, Other Conferences.

[3]  P. Pagnod-Rossiaux,et al.  16 channel phased array wavelength demultiplexer on InP with low polarisation sensitivity , 1994 .

[4]  C. Dragone,et al.  Demonstration of a 15*15 arrayed waveguide multiplexer on InP , 1992, IEEE Photonics Technology Letters.

[5]  B. Jalali,et al.  Epitaxial SiGeC waveguide photodetector grown on Si substrate with response in the 1.3-1.55-μm wavelength range , 1997, IEEE Photonics Technology Letters.

[6]  J. V. D. van der Tol,et al.  Low-loss phased-array based 4-channel wavelength demultiplexer integrated with photodetectors , 1994, IEEE Photonics Technology Letters.

[7]  Yasuyuki Inoue,et al.  Polymeric arrayed-waveguide grating multiplexer operating around 1.3 mu m , 1994 .

[8]  S. Suzuki,et al.  Arrayed-waveguide grating for wavelength division multi/demultiplexer with nanometre resolution , 1990 .

[9]  Subramanian S. Iyer,et al.  Si/SiGe heterostructures grown on SOI substrates by MBE for integrated optoelectronics , 1991 .

[10]  Graham T. Reed,et al.  Silicon-on-insulator optical rib waveguide loss and mode characteristics , 1994 .

[11]  C. Dragone.  An N*N optical multiplexer using a planar arrangement of two star couplers , 1991, IEEE Photonics Technology Letters.

[12]  Bahram Jalali,et al.  Integrated optical directional couplers in silicon-on-insulator , 1995 .

[13]  B. Jalali,et al.  Guided-wave Optical Circuits in Silicon-on-Insulator Technology , 1996 .

[14]  Mk Meint Smit,et al.  Four-channel integrated-optic wavelength demultiplexer with weak polarization dependence , 1991 .

[15]  R. Soref,et al.  Large single-mode rib waveguides in GeSi-Si and Si-on-SiO/sub 2/ , 1991 .

[16]  Graham T. Reed,et al.  Silicon-on-insulator optical rib waveguide circuits for fiber optic sensors , 1993, Other Conferences.

[17]  H. Okayama,et al.  Waveguide Array Grating Wavelength Demultiplexer on LiNbO3 , 1995 .

[18]  M. Smit.  New focusing and dispersive planar component based on an optical phased array , 1988 .