论文信息 - Thermodynamic study of the chemical vapor deposition in the SiCl3CH3–NH3–H2 system - 字舞流文

Thermodynamic study of the chemical vapor deposition in the SiCl3CH3–NH3–H2 system

Kehe Su | Q. Zeng | Lai-fei Cheng | Litong Zhang | Kang Guan | Haitao Ren | K. Su | Qingfeng Zeng