Size-changeable x-ray beam collimation using an adaptive x-ray optical system based on four deformable mirrors

A two-stage adaptive optical system using four piezoelectric deformable mirrors was constructed at SPring-8 to form collimated X-ray beams. The deformable mirrors were finely deformed to target shapes (elliptical for the upstream mirrors and parabolic for the downstream mirrors) based on shape data measured with the X-ray pencil beam scanning method. Ultraprecise control of the mirror shapes enables us to obtain various collimated beams with different beam sizes of 314 μm (358 μm) and 127 μm (65 μm) in the horizontal (vertical) directions, respectively, with parallelism accuracy of ~ 1 μrad rms.

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