论文信息 - Leakage Current and Reliability on Planar High-k Capacitor with Al2O3 Dielectric Deposited by Thermal-ALD - 字舞流文

Leakage Current and Reliability on Planar High-k Capacitor with Al2O3 Dielectric Deposited by Thermal-ALD

A. P. Nguyen | A. Sylvestre | D. Buttard | G. Parat | A. Lefèvre | F. Voiron | Sandrine Madassamy