A novel surface analytical model for cutting linearization error in fast tool/slow slide servo diamond turning

Abstract Fast tool/slow slide servo (FTS/SSS) technology plays an important role in machining freeform surfaces for the modern optics industry. The surface accuracy is a sticking factor that demands the need for a long-standing solution to fabricate ultraprecise freeform surfaces accurately and efficiently. However, the analysis of cutting linearization errors in the cutting direction of surface generation has received little attention. Hence, a novel surface analytical model is developed to evaluate the cutting linearization error of all cutting strategies for surface generation. It also optimizes the number of cutting points to meet accuracy requirements. To validate the theoretical cutting linearization errors, a series of machining experiments on sinusoidal wave grid and micro-lens array surfaces has been conducted. The experimental results demonstrate that these surfaces have successfully achieved the surface accuracy requirement of 1 μm with the implementation of the proposed model. These further credit the capability of the surface analytical model as an effective and accurate tool in improving profile accuracies and meeting accuracy requirements.