Linking Sensors With Telemetry: Impact On The System Design
暂无分享,去创建一个
[1] K.E. Petersen,et al. Silicon as a mechanical material , 1982, Proceedings of the IEEE.
[2] F. Rudolf. A micromechanical capacitive accelerometer with a two-point inertial-mass suspension , 1983 .
[3] Harrie A.C. Tilmans,et al. Resonant diaphragm pressure measurement system with ZnO on Si excitation , 1983 .
[4] Daniel Lapadatu,et al. Extremely miniaturized capacitive movement sensors using new suspension systems , 1994 .
[5] K. Bean,et al. Anisotropic etching of silicon , 1978, IEEE Transactions on Electron Devices.
[6] Willy Sansen,et al. An implantable pressure sensor for use in cardiology , 1990 .
[7] G. Stemme. Resonant silicon sensors , 1991 .
[8] K.E. Petersen,et al. Micromechanical accelerometer integrated with MOS detection circuitry , 1982, IEEE Transactions on Electron Devices.
[9] Willy Sansen,et al. A capacitive pressure sensor with low impedance output and active suppression of parasitic effects , 1990 .
[10] W. Sansen,et al. A new uniaxial accelerometer in silicon based on the piezojunction effect , 1988 .
[11] Robert Puers,et al. Capacitive sensors: When and how to use them☆ , 1993 .
[12] P. W. Chapman,et al. Silicon Diffused-Element Piezoresistive Diaphragms , 1962 .
[13] F. Rudolf,et al. Precision accelerometers with μg resolution , 1990 .
[14] A. Hanneborg,et al. An integrated capacitive pressure sensor with frequency-modulated output , 1986 .
[15] Miko Elwenspoek,et al. Micro resonant force gauges , 1992 .
[16] Bob Puers,et al. A subminiature capacitive movement detector using a composite membrane suspension , 1992 .
[17] J. J. Wortman,et al. Semiconductor mechanical sensors , 1969 .
[18] J. J. Wortman,et al. Effect of Mechanical Stress on p—n Junction Device Characteristics. II. Generation—Recombination Current , 1966 .
[19] Robert Puers,et al. A SCS resonant strain sensor , 1994 .
[20] Robert Puers,et al. A low power multi-sensor interface for injectable microprocessor-based animal monitoring system , 1994 .
[21] K. D. Wise,et al. An electrochemical P-N junction etch-stop for the formation of silicon microstructures , 1981, IEEE Electron Device Letters.