Linking Sensors With Telemetry: Impact On The System Design

This paper focuses on the typical aspects in the design of telemetry systems. The most prominent one is the low power consumption, and in most cases, miniaturisation comes second. Silicon technology can offer interesting perspectives for sensor development and some examples are highlighted. However, the transmission itself also is a key element in terms of power consumption, such that sensor interfacing, signal processing, data handling and data transmission also become key parameters in the total system design. It is emphasised that both need to be thoroughly matched.

[1]  K.E. Petersen,et al.  Silicon as a mechanical material , 1982, Proceedings of the IEEE.

[2]  F. Rudolf A micromechanical capacitive accelerometer with a two-point inertial-mass suspension , 1983 .

[3]  Harrie A.C. Tilmans,et al.  Resonant diaphragm pressure measurement system with ZnO on Si excitation , 1983 .

[4]  Daniel Lapadatu,et al.  Extremely miniaturized capacitive movement sensors using new suspension systems , 1994 .

[5]  K. Bean,et al.  Anisotropic etching of silicon , 1978, IEEE Transactions on Electron Devices.

[6]  Willy Sansen,et al.  An implantable pressure sensor for use in cardiology , 1990 .

[7]  G. Stemme Resonant silicon sensors , 1991 .

[8]  K.E. Petersen,et al.  Micromechanical accelerometer integrated with MOS detection circuitry , 1982, IEEE Transactions on Electron Devices.

[9]  Willy Sansen,et al.  A capacitive pressure sensor with low impedance output and active suppression of parasitic effects , 1990 .

[10]  W. Sansen,et al.  A new uniaxial accelerometer in silicon based on the piezojunction effect , 1988 .

[11]  Robert Puers,et al.  Capacitive sensors: When and how to use them☆ , 1993 .

[12]  P. W. Chapman,et al.  Silicon Diffused-Element Piezoresistive Diaphragms , 1962 .

[13]  F. Rudolf,et al.  Precision accelerometers with μg resolution , 1990 .

[14]  A. Hanneborg,et al.  An integrated capacitive pressure sensor with frequency-modulated output , 1986 .

[15]  Miko Elwenspoek,et al.  Micro resonant force gauges , 1992 .

[16]  Bob Puers,et al.  A subminiature capacitive movement detector using a composite membrane suspension , 1992 .

[17]  J. J. Wortman,et al.  Semiconductor mechanical sensors , 1969 .

[18]  J. J. Wortman,et al.  Effect of Mechanical Stress on p—n Junction Device Characteristics. II. Generation—Recombination Current , 1966 .

[19]  Robert Puers,et al.  A SCS resonant strain sensor , 1994 .

[20]  Robert Puers,et al.  A low power multi-sensor interface for injectable microprocessor-based animal monitoring system , 1994 .

[21]  K. D. Wise,et al.  An electrochemical P-N junction etch-stop for the formation of silicon microstructures , 1981, IEEE Electron Device Letters.