High Sensitivity of Dielectric films Structure for Advanced CMOS Image Sensor Technology

Chung-Wei Chang , Shou-Gwo Wuu, Dun-Nian Yaung, Chien-Hsien Tseng, Han-Chi Liu, David Yen, Yi-Jiun Lin, Chun-Ming Su, Chun-Yao Ko, C.Y. Yu, C.H. Lo, F.J.Hsiu, C.S.Tsai, Chung S. Wang, Mingo Liu, Chrong-Jung Lin, Ya-Chin King Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C. Microelectronics Lab, Department of Electrical Engineering, National Tsing Hua University, Hsin-Chu,Taiwan, R.O.C. Tel:(886)35636688 Ext.7088150, Fax:(886)35784848, E-mail: cwchang@tsmc.comT