论文信息 - High-Q and low-Rm 24-MHz radial-contour mode disk resonators fabricated with silicon passive integration technology

High-Q and low-Rm 24-MHz radial-contour mode disk resonators fabricated with silicon passive integration technology

A new approach for the fabrication of large contour-mode single-crystal silicon resonators has been demonstrated without the use of SOI substrates. 24-MHz-disk resonators have been built thanks to industrial facilities dedicated to the integration of passive components on silicon. They exhibit a good compromise between the quality factor Q higher than 50000 and the motional resistance of a few kilo-ohms.

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