论文信息 - Spatial characterization of an IPVD reactor: neutral gas temperature and interpretation of optical spectroscopy measurements - 字舞流文

Spatial characterization of an IPVD reactor: neutral gas temperature and interpretation of optical spectroscopy measurements

P. Vašina | J. Bretagne | L. De Poucques | M. Touzeau | C. Boisse-Laporte | Jean-Christophe Imbert | Lionel Teulé-Gay