论文信息 - Thin film sensors of SnO2-CuO-SnO2 sandwich structure to H2S

Thin film sensors of SnO2-CuO-SnO2 sandwich structure to H2S

Abstract SnO2 thin films were prepared using SnCl4 and O2 as precursors by means of plasma enhanced chemical vapour deposition (PECVD) method, and were modified with CuO by soaked technique to form a SnO2-CuO-SnO2 sandwich structure. The sensing composite thin film sensors were proved to be highly sensitive and selective to H2S. Furthermore, the response and recovery speed of the thin film sensors was fairly quick.

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