Pulsed laser deposition of diamond‐like amorphous carbon films from graphite and polycarbonate targets

Amorphous carbon (a‐C) and amorphous hydrogenated carbon (a‐C:H) films are produced by 248 nm pulsed laser ablation of graphite and polycarbonate targets in high vacuum conditions. Plasma plumes generated by target irradiation with different laser fluences are investigated with laser induced fluorescence spectroscopy and an electrostatic probe. Ions of C2+ with kinetic energies of several hundred eV are detected in the leading edge of the plasma plumes from both targets. These energetic species are proposed to be responsible for the formation of film structures corresponding to diamond‐like carbon (DLC), as it is found from electron‐energy‐loss spectroscopy (EELS) and Raman investigations of 0.5 μm films deposited onto steel substrates. The validation of a laser wavelength/fluence region for DLC formation found earlier for graphite targets is discussed and expanded to polycarbonate targets. An increase in laser fluence leads to higher percentages of sp3 bonds in the a‐C and a‐C:H films. For the a‐C:H film...

[1]  R. T. Williams,et al.  Deposition of Amorphous Carbon Films from Laser-Produced Plasmas , 1984 .

[2]  J. Robertson.  Deposition mechanism of a-C and a-C:H , 1993 .

[3]  S. Ferrer,et al.  Epitaxial growth of diamond-like films on Si(100) by pulsed-laser evaporation of graphite , 1992 .

[4]  A. Malshe,et al.  Pulsed laser deposition of diamondlike hydrogenated amorphous carbon films , 1990 .

[5]  K. Bewilogua,et al.  Structure of ion-plated amorphous hydrogenated carbon films investigated by electron energy loss spectroscopy , 1990 .

[6]  F. Davanloo,et al.  Microstructure of amorphic diamond films , 1991 .

[7]  W. Pompe,et al.  About the structure and bonding of laser generated carbon films by raman and electron energy loss spectroscopy , 1986 .

[8]  W. Gissler,et al.  Electron energy loss study of diamond-like and amorphous carbon films , 1993 .

[9]  E. M. Juengerman,et al.  Amorphic diamond films produced by a laser plasma source , 1990 .

[10]  J. Robertson.  The deposition mechanism of diamond-like a-C and a-C: H , 1994 .

[11]  M. Capano,et al.  Structural Analysis of Carbon Thin Films Deposited by Pulsed Laser Deposition , 1992 .

[12]  P. T. Murray,et al.  The Role of Hydrogen in Laser Deposition of Diamond-Like Carbon , 1991 .

[13]  C. B. Collins,et al.  Amorphic Diamond Films Produced by Laser Ablation , 1992 .

[14]  John Robertson,et al.  Properties of diamond-like carbon , 1992 .

[15]  C. B. Collins,et al.  Noncrystalline films with the chemistry, bonding, and properties of diamond , 1993 .

[16]  P. D. Swift,et al.  Electron optical techniques for microstructural andcompositional analysis of thin films , 1990 .

[17]  H. Pépin,et al.  Study of density in pulsed-laser deposited amorphous carbon films using x-ray reflectivity , 1994 .

[18]  A. Marchand,et al.  Caracterisation de materiaux carbones par microspectrometrie Raman , 1984 .

[19]  T. Sato,et al.  Diamond-like carbon films prepared by pulsed-laser evaporation , 1988 .

[20]  C. Collins,et al.  Modelling of a laser plasma source of amorphic diamond , 1991 .

[21]  G. Pharr,et al.  An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments , 1992 .

[22]  Jagdish Narayan,et al.  Diamond, diamond-like and titanium nitride biocompatible coatings for human body parts , 1994 .

[23]  E. M. Juengerman,et al.  Laser plasma diamond , 1990 .

[24]  William B. White,et al.  Characterization of diamond films by Raman spectroscopy , 1989 .

[25]  James P. Doyle,et al.  Vapor deposition processes for amorphous carbon films with sp3 fractions approaching diamond , 1991 .

[26]  Y. Mizushima,et al.  Preparation of heat-resistant alumina aerogels , 1993 .

[27]  Robert P. H. Chang,et al.  Pulsed laser deposition of amorphous diamond-like carbon films with ArF (193 nm) excimer laser , 1993 .

[28]  C. B. Hopper,et al.  Chemical structure and physical properties of diamond-like amorphous carbon films prepared by magnetron sputtering , 1990 .

[29]  Tetsuya Sato,et al.  Deposition of Diamond-like Carbon Films by Pulsed-Laser Evaporation , 1987 .

[30]  F. Comin,et al.  Epitaxial growth of crystalline, diamond-like films on Si (100) by laser ablation of graphite , 1990 .

[31]  David Beeman,et al.  Modeling studies of amorphous carbon , 1984 .

[32]  A. Catherinot,et al.  KrF laser photo-ablation of a graphite target: application to the development of thin films , 1994 .

[33]  Jagdish Narayan,et al.  Thin‐film deposition by a new laser ablation and plasma hybrid technique , 1989 .

[34]  T. Venkatesan,et al.  Optical spectroscopy: An in situ diagnostic for pulsed laser deposition of high Tc superconducting thin films , 1989 .

[35]  L. Ganapathi,et al.  Ybco Encapsulation by Diamond Like Carbon Films Deposited by Laser Ablation Technique , 1992 .

[36]  Tieer Gu,et al.  Pulsed laser deposition of diamond‐like carbon films , 1992 .

[37]  P. T. Murray,et al.  Growth of yttria-stabilized cubic zirconia films on GaAs (100) by pulsed laser evaporation , 1987 .

[38]  L. Ganapathi,et al.  Diamondlike carbon films as protective coatings for superconducting YBa2Cu3O7 films , 1993 .

[39]  John A. Woollam,et al.  Use of Raman scattering to investigate disorder and crystallite formation in as-deposited and annealed carbon films , 1984 .

[40]  F. Comin,et al.  Electron loss spectroscopy study of the growth by laser ablation of ultra-thin diamond-like films on Si(100) , 1992 .

[41]  S. Leppävuori,et al.  Laser Ablation Deposition of Diamond-Like Carbon Films , 1992 .