MEMS for automotive and consumer electronics

A car is skidding, and stabilizes itself without driver intervention; a laptop falls to the floor, and protects the hard drive by parking the read/write drive head automatically before impact; an airbag fires before the driver/occupant involved in an impending automotive crash impacts the steering wheel, thereby significantly reducing physical injury: - all systems involved are based exclusively on MEMS sensors. These crucial MEMS-sensor components of electronic control systems are making system reaction to human needs more intelligent, precise, and at much faster rates than humanly possible.

[1]  R. Neul,et al.  New surface micromachined angular rate sensor for vehicle stabilizing systems in automotive applications , 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..

[2]  Rainer Willig,et al.  Yaw Rate Sensor for Vehicle Dynamics Control System , 1995 .

[3]  W. Riethmuller,et al.  Novel Process For A Monolithic Integrated Accelerometer , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[4]  H.-J. Kress,et al.  Silicon pressure sensor with integrated CMOS signal-conditioning circuit and compensation of temperature coefficient , 1990 .

[5]  J. Marek,et al.  A precision yaw rate sensor in silicon micromachining , 1997 .

[6]  R. Ruther,et al.  A novel micromachining process for the fabrication of monocrystalline Si-membranes using porous silicon , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

[7]  H. Nathanson,et al.  The resonant gate transistor , 1967 .

[8]  K. Barla,et al.  Microstructure of Porous silicon and its evolution with temperature , 1984 .

[9]  K.E. Petersen,et al.  Silicon as a mechanical material , 1982, Proceedings of the IEEE.

[10]  P. Barth,et al.  Silicon micromechanical devices , 1983 .