MEMS for automotive and consumer electronics
暂无分享,去创建一个
[1] R. Neul,et al. New surface micromachined angular rate sensor for vehicle stabilizing systems in automotive applications , 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..
[2] Rainer Willig,et al. Yaw Rate Sensor for Vehicle Dynamics Control System , 1995 .
[3] W. Riethmuller,et al. Novel Process For A Monolithic Integrated Accelerometer , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.
[4] H.-J. Kress,et al. Silicon pressure sensor with integrated CMOS signal-conditioning circuit and compensation of temperature coefficient , 1990 .
[5] J. Marek,et al. A precision yaw rate sensor in silicon micromachining , 1997 .
[6] R. Ruther,et al. A novel micromachining process for the fabrication of monocrystalline Si-membranes using porous silicon , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).
[7] H. Nathanson,et al. The resonant gate transistor , 1967 .
[8] K. Barla,et al. Microstructure of Porous silicon and its evolution with temperature , 1984 .
[9] K.E. Petersen,et al. Silicon as a mechanical material , 1982, Proceedings of the IEEE.
[10] P. Barth,et al. Silicon micromechanical devices , 1983 .