论文信息 - Combining experiment and optical simulation in coherent X-ray nanobeam characterization of Si/SiGe semiconductor heterostructures - 字舞流文

Combining experiment and optical simulation in coherent X-ray nanobeam characterization of Si/SiGe semiconductor heterostructures

M. Lagally | M. Holt | S. Coppersmith | D. Savage | P. G. Evans | C. Simmons | Joonkyu Park | J. Prance | M. Eriksson | A. Pateras | J. Tilka | K. Sampson | Y. Ahn | P. Evans