Modeling and sliding-mode control of wafer stage in lithrography machines
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Li Li | Kang Li | Yue Dong | Fazhi Song | Yang Liu
[1] Changliang Xia,et al. Cogging Torque Modeling and Analyzing for Surface-Mounted Permanent Magnet Machines With Auxiliary Slots , 2013, IEEE Transactions on Magnetics.
[2] Chang-Ming Liaw,et al. Adaptive positioning control for a LPMSM drive based on adapted inverse model and robust disturbance observer , 2006 .
[3] Chen Xing-li,et al. Controller design based on ZPETC-FF and DOB for precision motion platform , 2014 .
[4] Umit Ozguner,et al. Variable structure control of electronic throttle valve , 2001, IVEC2001. Proceedings of the IEEE International Vehicle Electronics Conference 2001. IVEC 2001 (Cat. No.01EX522).
[5] Giuseppe Buja,et al. Disturbance torque estimation in a sensorless DC drive , 1993, Proceedings of IECON '93 - 19th Annual Conference of IEEE Industrial Electronics.
[6] Mehdi Narimani,et al. Design of Adaptive-Sliding Mode Controller for Positioning Control of Underwater Robotics , 2006, 2006 Canadian Conference on Electrical and Computer Engineering.
[7] Li Xu,et al. Output feedback adaptive robust precision motion control of linear motors , 2001, Autom..
[8] Jian-Xin Xu,et al. Variable Structure Systems: Towards the 21st Century , 2002 .
[9] Yaodong Pan,et al. Variable-Structure Control of Electronic Throttle Valve , 2008, IEEE Transactions on Industrial Electronics.
[10] D. Staton,et al. Comparison of Analytical Models of Cogging Torque in Surface-Mounted PM Machines , 2012, IEEE Transactions on Industrial Electronics.
[11] Yue Dong,et al. Research on the control of reticle stage macro movement motor , 2014, Proceeding of the 11th World Congress on Intelligent Control and Automation.
[12] Xiaoyan Huang,et al. Comparison of synchronization control techniques for traction motors of high-speed trains , 2014, 2014 17th International Conference on Electrical Machines and Systems (ICEMS).
[13] Jan Swevers,et al. The generalized Maxwell-slip model: a novel model for friction Simulation and compensation , 2005, IEEE Transactions on Automatic Control.
[14] Rong-Jong Wai,et al. Adaptive sliding-mode control for induction servomotor drive , 2000 .
[15] Chang-Ming Liaw,et al. Adaptive positioning control for a LPMSM drive based on adapted inverse model and robust disturbance observer , 2006, IEEE Transactions on Power Electronics.