论文信息 - Single Machine Oriented Match-Up Rescheduling Method for Semiconductor Manufacturing System

Single Machine Oriented Match-Up Rescheduling Method for Semiconductor Manufacturing System

Due to the high uncertainty of semiconductor manufacturing system, its rescheduling problems are extremely difficult to solve. In this paper, we investigate a novel single machine oriented match-up rescheduling (SMUR) method that implement the partial repair rescheduling in a dynamic manufacturing environment. Both of SMUR principle and algorithm are discussed. Its effectiveness has been verified by a simulation study. Computational results show that the proposed method has better stability and efficiency compared with the right-shift rescheduling method.

Fei Qiao | Bin Shi | Yumin Ma | Li Li

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