论文信息 - Dependence of glow discharge Si:H:Cl film morphology on diluent gas and SiCl4 partial pressure - 字舞流文

Dependence of glow discharge Si:H:Cl film morphology on diluent gas and SiCl4 partial pressure

P. Danesh | B. Pantchev | M. Rossi | G. Vitali | S. Simov | C. D. Blasi | M. Kalitzova