Next-Generation Planar SiC MOSFETs from 900 V to 15 kV

A family of planar MOSFETs with voltage ratings from 900 V to 15 kV are demonstrated. This family of planar MOSFETs represents Cree’s next generation MOSFET design and process, in which we continue to refine and evolve device design and processing to further shrink die sizes and enhance device performance. At voltage ratings of 3.3 kV and above, the specific on-resistance of the MOSFETs is approaching the theoretical limit. MOSFET switching performance in a clamped inductive switching circuit for the full range of voltage ratings is also demonstrated. Finally, improved threshold voltage and body diode stability under long-term stresses are presented.