Surface Control of Bottom Electrode in Ultra-Thin SiN Metal–Insulator–Metal Decoupling Capacitors for High Speed Processors
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Y. Hayashi | M. Furumiya | N. Inoue | I. Kume | J. Kawahara | N. Furutake | S. Saito | T. Toda | K. Matsui | K. Ohto | T. Iwaki | T. Shinmura