Angular-interrogation attenuated total reflection metrology system for plasmonic sensors.

We develop an angular-interrogation attenuated total reflection (ATR) metrology system for three different plasmonic sensors, namely, a conventional surface plasmon resonance (SPR) device, a coupled-waveguide SPR device, and a nanoparticle-enhanced SPR device. The proposed metrology system is capable of measuring the reflectivity spectra of the transverse magnetic mode and the transverse electric mode simultaneously. Through the optimal control of the fabrication process and use of sophisticated system instrumentation, the experimental results confirm that the developed ATR system is capable of measuring the resonant angle with an angular accuracy of 10(-4) deg.

[1]  Shean-Jen Chen,et al.  Fabrication and metrology of an electro-optic polymer light modulator based on waveguide-coupled surface plasmon resonance , 2005 .

[2]  F. Chien,et al.  A sensitivity comparison of optical biosensors based on four different surface plasmon resonance modes. , 2004, Biosensors & bioelectronics.

[3]  S. J. Chen,et al.  Enhancement of the resolution of surface plasmon resonance biosensors by control of the size and distribution of nanoparticles. , 2004, Optics letters.

[4]  K-A Lai,et al.  A novel ultrahigh-resolution surface plasmon resonance biosensor with an Au nanocluster-embedded dielectric film. , 2004, Biosensors & bioelectronics.

[5]  Sahin Kaya Ozdemir,et al.  Temperature effects on surface plasmon resonance: design considerations for an optical temperature sensor , 2003 .

[6]  L. Liz‐Marzán,et al.  Gold nanoparticle thin films , 2002 .

[7]  Jiří Homola,et al.  Long-range surface plasmons for high-resolution surface plasmon resonance sensors , 2001 .

[8]  Z. Salamon,et al.  Optical anisotropy in lipid bilayer membranes: coupled plasmon-waveguide resonance measurements of molecular orientation, polarizability, and shape. , 2001, Biophysical journal.

[9]  Petr I. Nikitin,et al.  Surface plasmon resonance interferometry for micro-array biosensing , 2000 .

[10]  S. Lipson,et al.  Surface plasmon resonance phase imaging , 2000 .

[11]  Günter Gauglitz,et al.  Surface plasmon resonance sensors: review , 1999 .

[12]  B. Persson,et al.  Quantitative determination of surface concentration of protein with surface plasmon resonance using radiolabeled proteins , 1991 .

[13]  G. D. Scott,et al.  Optical excitation of surface plasma waves in layered media , 1977 .

[14]  B. Liedberg,et al.  Surface plasmon resonance for gas detection and biosensing , 1983 .