论文信息 - Optoelectronic method for device characterization and experimental validation of operational performance

Optoelectronic method for device characterization and experimental validation of operational performance

This paper presents recent advances in the optoelectronic methodology for characterization of microelectromechanical systems (MEMS) and experimental determination of their functional behavior, by making high spatial resolution measurements with nanometer accuracy, which is especially needed in order to perform studies of long-term effects.

Ryszard J. Pryputniewicz | R. Pryputniewicz

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