论文信息 - Experimental Study on Electrostatically Actuated Micro-Gripper Based on Silica Process

Experimental Study on Electrostatically Actuated Micro-Gripper Based on Silica Process

The characteristics of a kind of comb-drive electrostatic actuated micro-gripper are tested. The test platform using a microscope-CCD-computer, the state information of the micro-gripper obtained by data acquisition and image processing, voltage-displacement characteristic curve is obtained and the mathematical equation is established. The analysis of the characteristic equation has shown the consistency and rationality of the theoretical design and the experimental results. The main factors that cause the difference between the theoretical design and the actual test performance are analyzed, and the design method and experimental results is obtained for the micro-gripper in the field of micro-assembly.

Yuhe Li | Qingxiang Li | Yong Li | Pengnian Yang

[1] William C. Tang,et al. Laterally driven polysilicon resonant microstructures , 1989, IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'.

[2] F. Mohd-Yasin,et al. Techniques of EMG signal analysis: detection, processing, classification and applications , 2006, Biological Procedures Online.

[3] B. Bhushan,et al. Micromechanical and tribological characterization of doped single-crystal silicon and polysilicon films for microelectromechanical systems devices , 1997 .

[4] Stephane Regnier,et al. Electrostatic actuated micro gripper using an amplification mechanism , 2004 .

[5] Michael Curt Elwenspoek,et al. Comb-drive actuators for large displacements , 1996 .

[6] Bin Hong-zan. Dimensional inspecting system of thin sheet parts based on machine vision , 2007 .