Microchannel Fabrication on Glass Materials for Microfluidic Devices
暂无分享,去创建一个
M. Park | Jihong Hwang | Y. Cho | Bo Hyun Kim
[1] F. Fang,et al. Recent advances and challenges of abrasive jet machining , 2018, CIRP Journal of Manufacturing Science and Technology.
[2] K. Ashida,et al. Proposal of laser assisted hot embossing technology for glass , 2018 .
[3] Su Young Choi,et al. Wetting properties of hybrid structure with hydrophilic ridges and hydrophobic channels , 2018 .
[4] M. Park,et al. Wettability of microstructured Pyrex glass with hydrophobic and hydrophilic properties , 2017 .
[5] Y. Cho,et al. Fabrication of PMMA Acoustophoretic Microfluidic Chip Using Plasma Assisted Bonding , 2017 .
[6] M. Park,et al. Circuit patterning using laser on transparent material , 2017 .
[7] J. K. Spelt,et al. Prediction of the erosive footprint in the abrasive jet micro-machining of flat and curved glass , 2017 .
[8] J. K. Spelt,et al. Abrasive jet machining of channels on highly-curved glass and PMMA surfaces , 2016 .
[9] B. H. Kim,et al. Surface polishing of quartz-based microfluidic channels using CO2 laser , 2016 .
[10] H. Qi,et al. Numerical and experimental study on ultrasonic vibration-assisted micro-channelling of glasses using an abrasive slurry jet , 2016 .
[11] D. Nieto,et al. Fabrication of microlens arrays on soda-lime glass using a laser direct-write technique and a thermal treatment assisted by a CO2 laser , 2015 .
[12] S. Prakash,et al. Fabrication of microchannels: A review , 2015 .
[13] Shun-Tong Chen,et al. A force controlled grinding-milling technique for quartz-glass micromachining , 2015 .
[14] B. H. Kim,et al. Experimental investigation of ECDM for fabricating micro structures of quartz , 2015 .
[15] Kin Fong Lei,et al. Chapter 1:Materials and Fabrication Techniques for Nano- and Microfluidic Devices , 2014 .
[16] Che-Hsin Lin,et al. Rapid soda-lime glass etching process for producing microfluidic channels with higher aspect ratio , 2014 .
[17] Jian Liu,et al. Micro-hole drilling and cutting using femtosecond fiber laser , 2014 .
[18] J. K. Spelt,et al. Surface evolution models for abrasive slurry jet micro-machining of channels and holes in glass , 2014 .
[19] J. K. Spelt,et al. The effects of dilute polymer solution elasticity and viscosity on abrasive slurry jet micro-machining of glass , 2014 .
[20] Ji-Yen Cheng. Crack-free Micromachining of Glass Ceramic Using Visible LIBWE , 2013 .
[21] D. Snita,et al. Fast and simple fabrication procedure of whole-glass microfluidic devices with metal electrodes , 2013 .
[22] F. He,et al. Compact 3D Microfluidic Channel Structures Embedded in Glass Fabricated by Femtosecond Laser Direct Writing , 2013 .
[23] J. K. Spelt,et al. Numerical simulation of surface roughness and erosion rate of abrasive jet micro-machined channels , 2013 .
[24] K. Ren,et al. Materials for microfluidic chip fabrication. , 2013, Accounts of chemical research.
[25] F. He,et al. Direct laser writing of sub-50 nm nanofluidic channels buried in glass for three-dimensional micro-nanofluidic integration. , 2013, Lab on a chip.
[26] J. Gottmann,et al. Microcutting and Hollow 3D Microstructures in Glasses by In-volume Selective Laser-induced Etching (ISLE) , 2013 .
[27] C. Chung,et al. Fabrication and simulation of glass micromachining using CO2 laser processing with PDMS protection , 2013 .
[28] Thai Nguyen,et al. A STUDY OF MICRO-CHANNELING ON GLASSES USING AN ABRASIVE SLURRY JET , 2012 .
[29] Hongliang Wang,et al. Single step channeling in glass interior by femtosecond laser , 2012 .
[30] Chinghua Hung,et al. Ultrasonic vibration-assisted optical glass hot embossing process , 2012 .
[31] R. Wüthrich,et al. Micro-texturing channel surfaces on glass with spark assisted chemical engraving , 2012 .
[32] S. Ahsan,et al. Femtosecond Laser Induced Nanostructures in Soda-lime Glass , 2012 .
[33] J. Miao,et al. A practical guide for the fabrication of microfluidic devices using glass and silicon. , 2012, Biomicrofluidics.
[34] Y. Wong,et al. A study on microgrinding of brittle and difficult-to-cut glasses using on-machine fabricated poly crystalline diamond (PCD) tool , 2012 .
[35] Sung-hoon Ahn,et al. Review: Developments in micro/nanoscale fabrication by focused ion beams , 2012 .
[36] Ji-Yen Cheng,et al. Blue Light Plasma Emission During LIBWE Using 532 nm Q-switched Nanosecond Laser , 2012 .
[37] H. Tsai,et al. Fabrication of glass micro-prisms using ultra-fast laser pulses with chemical etching process , 2012 .
[38] Thai Nguyen,et al. Modelling of the micro-channelling process on glasses using an abrasive slurry jet , 2012 .
[39] Jing‐Juan Xu,et al. Glass etching to bridge micro- and nanofluidics. , 2012, Lab on a chip.
[40] Shun-Tong Chen,et al. Development of an extremely thin grinding-tool for grinding microgrooves in optical glass , 2011 .
[41] Jun Ni,et al. A finite element based model for electrochemical discharge machining in discharge regime , 2011 .
[42] Wong Yoke San,et al. An experimental approach to study the capability of end-milling for microcutting of glass , 2011 .
[43] Cheng-Kuang Yang,et al. Effect of surface roughness of tool electrode materials in ECDM performance , 2010 .
[44] C. Chung,et al. CO2 laser micromachined crackless through holes of Pyrex 7740 glass , 2010 .
[45] Qing Yang,et al. Maskless fabrication of concave microlens arrays on silica glasses by a femtosecond-laser-enhanced local wet etching method. , 2010, Optics express.
[46] H. Niino,et al. Flexible 3D deep microstructures of silica glass by laser-induced backside wet etching , 2010 .
[47] Thai Nguyen,et al. Machining of Micro-Channels on Brittle Glass Using an Abrasive Slurry Jet , 2010 .
[48] C. Rüssel,et al. Micro structuring of inorganic glass by hot embossing of coated glass wafers , 2010 .
[49] J. Gäbler,et al. Precision and micro CVD diamond-coated grinding tools , 2010 .
[50] R. Hsu,et al. Hot Embossing of Parallel v‐Groove Microstructures on Glass , 2009 .
[51] Jun Wang,et al. Modelling the erosion rate in micro abrasive air jet machining of glasses , 2009 .
[52] T. Matsumura,et al. Effect of tilt angle on cutting regime transition in glass micromilling , 2009 .
[53] R. Maeda,et al. REPLICATION OF NANO/MICRO QUARTZ MOLD BY HOT EMBOSSING AND ITS APPLICATION TO BOROSILICATE GLASS EMBOSSING , 2008 .
[54] Souta Matsusaka,et al. Micro-machinability of silver–sodium ion-exchanged glass by UV nanosecond laser , 2008 .
[55] T. Matsumura,et al. Influence of tool inclination on brittle fracture in glass cutting with ball end mills , 2008 .
[56] B. Yan,et al. Improvement of Electrochemical Microdrilling Accuracy Using Helical Tool , 2008 .
[57] M. Hong,et al. Laser etching of glass substrates by 1064 nm laser irradiation , 2008 .
[58] V. Jain,et al. On the mechanism of material removal in electrochemical spark machining of quartz under different polarity conditions , 2008 .
[59] T. Matsumura,et al. Cutting process of glass with inclined ball end mill , 2008 .
[60] J. Miao,et al. On the wet etching of Pyrex glass , 2008 .
[61] Vinod Yadava,et al. Laser beam machining—A review , 2008 .
[62] Biing-Hwa Yan,et al. Improving the machining efficiency in electrochemical discharge machining (ECDM) microhole drilling by offset pulse voltage , 2008 .
[63] J. Vieillard,et al. Integrated microfluidic-microoptical systems fabricated by dry etching of soda-lime glass , 2008 .
[64] M. Hong,et al. Near-field enhanced femtosecond laser nano-drilling of glass substrate , 2008 .
[65] Q. Ren,et al. A Rapid and Low-Cost Procedure for Fabrication of Glass Microfluidic Devices , 2007, Journal of Microelectromechanical Systems.
[66] A. Tseng,et al. Recent developments on microablation of glass materials using excimer lasers , 2007 .
[67] E. Carrilho,et al. A toner-mediated lithographic technology for rapid prototyping of glass microchannels. , 2007, Lab on a chip.
[68] S. Dimov,et al. Focused-ion-beam direct structuring of fused silica for fabrication of nano-imprinting templates , 2007 .
[69] B. Yan,et al. 3D microstructuring of Pyrex glass using the electrochemical discharge machining process , 2007 .
[70] S. Shen,et al. Fabrication of 3-D Submicron Glass Structures by FIB , 2007, 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems.
[71] F. Tay,et al. Strategies in deep wet etching of Pyrex glass , 2007 .
[72] B. Yan,et al. The tool geometrical shape and pulse-off time of pulse voltage effects in a Pyrex glass electrochemical discharge microdrilling process , 2007 .
[73] D. Pham,et al. A study of fused silica micro/nano patterning by focused-ion-beam , 2007 .
[74] K. Zimmer,et al. Backside etching of fused silica with Nd:YAG laser , 2006 .
[75] R. Maeda,et al. Microstructuring of glassy carbon mold for glass embossing - Comparison of focused ion beam, nano/femtosecond-pulsed laser and mechanical machining , 2006 .
[76] M. Naftali,et al. Dry etching of deep cavities in Pyrex for MEMS applications using standard lithography , 2006 .
[77] N. Morita,et al. Rapid nanopatterning of a Zr-based metallic glass surface utilizing focused ion beam induced selective etching , 2006 .
[78] M. Yen,et al. Crack-free micromachining on glass using an economic Q-switched 532 nm laser , 2006 .
[79] H. Niino,et al. Rapid prototyping of silica glass microstructures by the LIBWE method: Fabrication of deep microtrenches , 2006 .
[80] K. Takechi,et al. Very High Rate and Uniform Glass Etching with HF/HCl Spray for Transferring Thin-Film Transistor Arrays to Flexible Substrates , 2006 .
[81] L. A. Hof,et al. The gas film in Spark Assisted Chemical Engraving (SACE) - A key element for micro-machining applications , 2006 .
[82] T. Akashi,et al. Deep reactive ion etching of borosilicate glass using an anodically bonded silicon wafer as an etching mask , 2006 .
[83] T. Matsumura,et al. Engineering surface and development of a new DNA micro array chip , 2006 .
[84] N. Lee,et al. Deep dry etching of borosilicate glass using SF6 and SF6/Ar inductively coupled plasmas , 2005 .
[85] Daniel T Chiu,et al. Disposable microfluidic devices: fabrication, function, and application. , 2005, BioTechniques.
[86] A. Offenhäusser,et al. The evaporated metal masks for chemical glass etching for BioMEMS , 2005 .
[87] Eric R. Marsh,et al. Micro machining glass with polycrystalline diamond tools shaped by micro electro discharge machining , 2004 .
[88] T. Chong,et al. Laser Precision Engineering of Glass Substrates , 2004 .
[89] A. Evans,et al. A new masking technology for deep glass etching and its microfluidic application , 2004 .
[90] T. Choi,et al. Liquid-assisted femtosecond laser drilling of straight and three-dimensional microchannels in glass , 2004 .
[91] D. Miller. Micromachining with abrasive waterjets , 2004 .
[92] Jian Zhao,et al. Wet etching study of silica glass after CW CO2 laser treatment , 2004 .
[93] W. Cho,et al. Micro-grooving of glass using micro-abrasive jet machining , 2004 .
[94] Guoxiong Zhang,et al. An experimental study of optical glass machining , 2004 .
[95] M. Esashi,et al. Smooth surface glass etching by deep reactive ion etching with SF6 and Xe gases , 2003 .
[96] D. Chiu,et al. Rapid prototyping of glass microchannels , 2003 .
[97] Y. Horiike,et al. Deep dry etching of borosilicate glass using fluorine-based high-density plasmas for microelectromechanical system fabrication , 2003 .
[98] B. Ngoi,et al. Ultraprecision Diamond Turning of Glass with Ultrasonic Vibration , 2003 .
[99] H. Niino,et al. Surface micro-fabrication of silica glass by excimer laser irradiation of organic solvent , 2003 .
[100] H. Bleuler,et al. Investigations of the spark-assisted chemical engraving , 2003 .
[101] L. Schäfer,et al. Micro abrasive pencils with CVD diamond coating , 2003 .
[102] B. Yan,et al. Study of precision micro-holes in borosilicate glass using micro EDM combined with micro ultrasonic vibration machining , 2002 .
[103] Reinhart Poprawe,et al. UV laser radiation-induced modifications and microstructuring of glass , 2002, SPIE LASE.
[104] H. Wensink. Fabrication of microstructures by powder blasting , 2002 .
[105] Gwo-Bin Lee,et al. A fast prototyping process for fabrication of microfluidic systems on soda-lime glass , 2001 .
[106] H. Fouckhardt,et al. Deep wet etching of fused silica glass for hollow capillary optical leaky waveguides in microfluidic devices , 2001 .
[107] C. T. Yang,et al. Micro Hole Machining of Borosilicate Glass through Electrochemical Discharge Machining (ECDM) , 2001 .
[108] M. Esashi,et al. Deep reactive ion etching of Pyrex glass using SF6 plasma , 2001 .
[109] M. Gijs,et al. Powder blasting for three-dimensional microstructuring of glass , 2000 .
[110] M. Gijs,et al. The introduction of powder blasting for sensor and microsystem applications , 2000 .
[111] P. J. Slikkerveer,et al. High quality mechanical etching of brittle materials by powder blasting , 2000 .
[112] S. Quake,et al. Monolithic microfabricated valves and pumps by multilayer soft lithography. , 2000, Science.
[113] W. J. Endres,et al. AN EXPERIMENTAL STUDY OF ORTHOGONAL MACHINING OF GLASS , 2000 .
[114] V. Fascio,et al. 3D microstructuring of glass using electrochemical discharge machining (ECDM) , 1999, MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478).
[115] V. Fascio,et al. In situ measurement and micromachining of glass , 1999, MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478).
[116] B. Bhattacharyya,et al. Experimental investigations into electrochemical discharge machining (ECDM) of non-conductive ceramic materials , 1999 .
[117] G. Stemme,et al. Deep wet etching of borosilicate glass using an anodically bonded silicon substrate as mask , 1998 .
[118] P. J. Slikkerveer,et al. Erosion and damage by sharp particles , 1998 .
[119] Amitabha Ghosh,et al. Mechanism of material removal in electrochemical discharge machining: a theoretical model and experimental verification , 1997 .
[120] Amitabha Ghosh,et al. Mechanism of spark generation during electrochemical discharge machining: a theoretical model and experimental verification , 1996 .
[121] Xi-Qing Sun,et al. Micro ultrasonic machining and self-aligned multilayer machining/assembly technologies for 3D micromachines , 1996, Proceedings of Ninth International Workshop on Micro Electromechanical Systems.
[122] H. V. Snelling,et al. Experimental observations and analysis of CO2 laser‐induced microcracking of glass , 1995 .
[123] D. Golini,et al. Chemomechanical effects in ductile-regime machining of glass , 1993 .
[124] T. Ohnishi,et al. Focused‐ion‐beam ‘‘cutter’’ and ‘‘attacher’’ for micromachining and device transplantation , 1991 .
[125] R. Scattergood,et al. Ductile-Regime Grinding: A New Technology for Machining Brittle Materials , 1991 .
[126] W. S. Blackley,et al. Ductile-regime machining model for diamond turning of brittle materials , 1991 .
[127] H. Ahmed,et al. Scanning ion microscopy and microsectioning of electron beam recrystallized silicon on insulator devices , 1988 .
[128] J. Melngailis. Focused ion beam technology and applications , 1987 .
[129] A. Evans,et al. Elastic/Plastic Indentation Damage in Ceramics: The Lateral Crack System , 1982 .
[130] I. Finnie,et al. On the machining of glass , 1980 .
[131] J. Haisma,et al. Transparent single-point turning of optical glass:: A phenomenological presentation , 1979 .
[132] S. Malkin,et al. Grinding of Glass: The Mechanics of the Process , 1976 .
[133] S. Malkin,et al. Grinding of Glass: Surface Structure and Fracture Strength , 1976 .
[134] A. Dyakonov,et al. Enhancing Performances of Micro-Grinding of BK-7 Glass through Modification of PCD Micro-Tool , 2017 .
[135] Jan C. Aurich,et al. Integrated Desktop Machine Tool for Manufacturing and Application of Ultra-small Micro Pencil Grinding Tools , 2014 .
[136] Chinghua Hung,et al. Development of a new apparatus for ultrasonic vibration-assisted glass hot embossing process , 2013 .
[137] T. Matsumura,et al. Parametric glass milling with simultaneous control , 2013 .
[138] C. Chu,et al. Hybrid micromachining of glass using ECDM and micro grinding , 2013 .
[139] K. Yamaguchi,et al. Micro Hole Processing Using Electro-Chemical Discharge Machining , 2012 .
[140] P. Herman,et al. Single- and multi-scan femtosecond laser writing for selective chemical etching of cross section patternable glass micro-channels , 2012 .
[141] K. Lang,et al. Advances in CO2-Laser Drilling of Glass Substrates , 2012 .
[142] T. Matsumura,et al. Abrasive water jet machining of glass with stagnation effect , 2011 .
[143] Wong Yoke San,et al. Ultraprecision ductile mode machining of glass by micromilling process , 2011 .
[144] R. Masel,et al. The fabrication of all-silicon micro gas chromatography columns using gold diffusion eutectic bonding , 2009 .
[145] W. H. Lin,et al. Crackless linear through-wafer etching of Pyrex glass using liquid-assisted CO2 laser processing , 2008 .
[146] M. Mitsuishi,et al. Analysis of laser micromachining in silica glass with an absorbent slurry , 2008 .
[147] Ichiki,et al. Miniaturized Glass Chips Capillary Electrophoresis Fabricated Using Deep Dry Etching and Anodic on Pyrex Bonding , 2006 .
[148] C. Iliescu. MICROFLUIDICS IN GLASS: TECHNOLOGIES AND APPLICATIONS , 2006 .
[149] T. Shirakashi,et al. A Study on Cutting Force in the Milling Process of Glass , 2005 .
[150] M. Achtsnicka,et al. Modelling and evaluation of the micro abrasive blasting process , 2005 .
[151] A. Lenk,et al. Damage-free laser micromarking of glass , 2000 .
[152] T. Masuzawa,et al. Microultrasonic Machining by the Application of Workpiece Vibration , 1999 .
[153] Pulak M. Pandey,et al. On the analysis of the electrochemical spark machining process , 1999 .
[154] Vijay K. Jain,et al. Experimental investigations into ECSD process using various tool kinematics , 1998 .
[155] Y. Takeuchi,et al. Ultraprecision 3D Micromachining of Glass , 1996 .
[156] Kenji Inoue,et al. Ultraprecision ductile cutting of glass by applying ultrasonic vibration , 1992 .
[157] H. Ahmed,et al. Fabrication of Planar and Cross-Sectional TEM Specimens Using a Focused Ion Beam , 1990 .
[158] Nakasuji Tomoaki,et al. Diamond Turning of Brittle Materials for Optical Components , 1990 .