论文信息 - Atomic Layer Deposition for Semiconductors - 字舞流文

Atomic Layer Deposition for Semiconductors

[1] Технология. International Electron Devices Meeting , 2010 .

[2] A. M. Glass,et al. Principles and Applications of Ferroelectrics and Related Materials , 1977 .

[3] Sang Woon Lee,et al. Mass-Production Memories (DRAM and Flash) , 2014 .

[4] M. Knez,et al. Atomic layer deposition of nanostructured materials , 2012 .

[5] M. Ferenets,et al. Thin Solid Films , 2010 .