论文信息 - Growth of 4H-SiC on AlN/Si(100) complex substrate by chemical vapor deposition - 字舞流文

Growth of 4H-SiC on AlN/Si(100) complex substrate by chemical vapor deposition

R. Zhang | P. Han | T. Han | J. Zhu | S. Gu | J. Shi | Z. Qin | Z. Li | C.X. Liu | Y.D. Zheng | K. Fu | B. Yan