论文信息 - Interface analysis of HfO2 films on (1 0 0)Si using x-ray photoelectron spectroscopy - 字舞流文

Interface analysis of HfO2 films on (1 0 0)Si using x-ray photoelectron spectroscopy

E. Filatova | V. Afanas'ev | A. Ovchinnikov | E. Taracheva | A. Sokolov | M. Brzhezinskaya