论文信息 - Enhancement of Pattern Fidelity for Metal Layer in Attenuated PSM Lithography by OPC - 字舞流文

Enhancement of Pattern Fidelity for Metal Layer in Attenuated PSM Lithography by OPC

Jun-Ha Lee | Hoong-Joo Lee | Jun-Ha Lee

[1] Ki Ryang Byun,et al. Field-effect ion-transport devices with carbon nanotube channels: Schematics and simulations , 2004 .