Atomic Force Microscopy in nanometrology: modeling and enhancement of the instrument

This Ph.D. project is aimed at developing and validating techniques for successful use of Atomic Force Microscopy in nanometrology. In particular modeling of the instrument behavior, appropriate calibration, correction of distortions and enhancement of AFMs performances are addressed. Typical AFM error sources are described, mainly arising from the scanning system, the probe, the environment and from data processing subsequent to measurement. Scaling and crosstalk, creep and hysteresis, noise, drift, tip convolution and software are some of the error sources discussed. Different contributions are eventually unified into a single mathematical model, which in principle completely describes AFM scanning. The issue of AFM calibration is addressed. A new concept of calibration standards is introduced, based on optical fiber technology. It is shown how fiber micro-cylinders can be applied for accurate calibration of horizontal and vertical AFM axes, in the whole scan range. Crosstalk error evaluation and correction are also discussed. The work continues with a section discussing the possibility of compensating or avoiding typical AFM distortions. Three-dimensional topography reconstruction achieved through surface coupling is proposed for elimination of vertical drift artifacts. Application of an auto-correlation function is then proposed for alignment of profiles and lateral drift distortion removal. A method for modeling distortions due to tip wear rate in contact mode AFM is eventually proposed, based on lateral force monitoring. The last part addresses instrument enhancement, proposing a solution to three typical AFM problems. 1) Difficult tip access to steep slopes is overcome through matching and coupling of two or more surface topographies, scanned with different installation slopes. 2) A matching automatic routine is also implemented for mosaicking operations: stitching of three-dimensional topography data sets allows the maximum measurable range limitations to be overcome. 3) The problem of scan time reduction is discussed in the last section, where a feature oriented measurement approach is investigated for overcoming raster scan limitations. With the new method, the probe is driven along free-form paths, scanning with high resolution only discrete features of interest and collecting only relevant data.

[1]  M. Hemmleb,et al.  A VERSATILE 3 D CALIBRATION OBJECT FOR VARIOUS MICRO-RANGE MEASUREMENT METHODS , 2004 .

[2]  Tilo Pfeifer,et al.  Optical Methods for Dimensional Metrology in Production Engineering , 2002 .

[3]  A. La Storia,et al.  Characterization of bacteriocin-coated antimicrobial polyethylene films by atomic force microscopy. , 2008, Journal of food science.

[4]  Hemantha K. Wickramasinghe,et al.  Atomic force microscope–force mapping and profiling on a sub 100‐Å scale , 1987 .

[5]  Francesco Marinello,et al.  Increase of maximum detectable slope with optical profilers, through controlled tilting and image processing , 2007 .

[6]  Wei Chu,et al.  Study of an image stitching method for linewidth measurement , 2004, Photomask Japan.

[7]  Liang-Chia Chen,et al.  Development of white light confocal microscopy with innovative fringe projection for full-field micro surface profilometry , 2005, IEEE International Conference on Mechatronics, 2005. ICM '05..

[8]  Theodore V. Vorburger,et al.  Industrial uses of STM and AFM , 1999 .

[9]  Enrico Savio,et al.  Use of cylindrical artefacts for AFM vertical calibration , 2007 .

[10]  Zhang Shizhu.  Micro contact and stick-slip number between AFM probe tip and sample surface , 2003 .

[11]  A. Kung,et al.  Self calibration method for 3D roundness of spheres using an ultraprecision coordinate measuring machine. , 2005 .

[12]  J. Archard.  Contact and Rubbing of Flat Surfaces , 1953 .

[13]  J. F. Jorgensen,et al.  Lateral metrology using scanning probe microscopes, 2D pitch standards and image processing , 1998 .

[14]  M. Hayes,et al.  Resampling and reconstruction with fractal interpolation functions , 1998, IEEE Signal Processing Letters.

[15]  Liam Blunt,et al.  Calibration of step heights and roughness measurements with atomic force microscopes , 2003 .

[16]  Enrico Savio,et al.  Feature-oriented measurement strategy in atomic force microscopy , 2007 .

[17]  Byong Chon Park,et al.  Measurement of microscope calibration standards in nanometrology using a metrological atomic force microscope , 2006 .

[18]  J. Kirby,et al.  A robust motion estimation algorithm for PIV , 2005 .

[19]  Jørgen Garnæs,et al.  True Three‐Dimensional Calibration of Closed Loop Scanning Probe Microscopes , 2006 .

[20]  Hans Nørgaard Hansen,et al.  Development and analysis of a software tool for stitching three dimensional surface topography data sets , 2007 .

[21]  Hal Edwards,et al.  Vertical metrology using scanning-probe microscopes: Imaging distortions and measurement repeatability , 1998 .

[22]  A. Bukharaev,et al.  THREE-DIMENSIONAL PROBE AND SURFACE RECONSTRUCTION FOR ATOMIC FORCE MICROSCOPY USING A DECONVOLUTION ALGORITHM , 1998 .

[23]  W. Häberle,et al.  Ultrahigh density, high-data-rate NEMS-based AFM data storage system , 1999 .

[24]  P. A. Arutyunov,et al.  Artifacts in Atomic Force Microscopy , 2001 .

[25]  Stefano Zanoni.  Development and implementation of software tools for surface processing and analysis , 2005 .

[26]  P.-E. Hansen,et al.  Determination of sub-micrometer high aspect ratio grating profiles , 2005, SPIE Optics + Photonics.

[27]  R. Ulrich,et al.  Drawing glass fibers with complex cross section , 1991 .

[28]  D. Lucca,et al.  Surfaces in Precision Engineering, Microengineering and Nanotechnology , 2003 .

[29]  Francesco Marinello.  Development and implementation of a software tool and test of an integrated system for surface mapping at nanometric scale , 2003 .

[30]  Feng Huang,et al.  Dual unit scanning tunneling microscope-atomic force microscope for length measurement based on reference scales , 1999 .

[31]  Gaoliang Dai,et al.  Metrological large range scanning probe microscope , 2004 .

[32]  H.-U. Danzebrink,et al.  Advances in Scanning Force Microscopy for Dimensional Metrology , 2006 .

[33]  Ludger Koenders,et al.  Towards a Guideline for SPM Calibration , 2006 .

[34]  G. Stevens,et al.  Nano- and meso-measurement methods in the study of dielectrics , 2005, IEEE Transactions on Dielectrics and Electrical Insulation.

[35]  Enrico Savio,et al.  Fast technique for AFM vertical drift compensation , 2007 .

[36]  Ludwig Josef Balk,et al.  Calibration of a scanning probe microscope by the use of an interference-holographic position measurement system , 2003 .

[37]  James C. Wyant,et al.  Large Field of View, High Spatial Resolution, Surface Measurements , 1998 .

[38]  J. Villarrubia.  Morphological estimation of tip geometry for scanned probe microscopy , 1994 .

[39]  P. M. Lonardo,et al.  Emerging trends in surface metrology , 2002 .

[40]  Koji Takada,et al.  Direct measurement instrument for lattice spacing on regular crystalline surfaces using a scanning tunneling microscope and laser interferometry , 2003 .

[41]  U. Hartmann,et al.  Scratching resistance of diamond-like carbon coatings in the subnanometer regime , 1999 .

[42]  John S. Villarrubia.  Tip and Surface Reconstruction in Scanned Probe Microscopy , 1997 .

[43]  Herschel M. Marchman,et al.  Dimensional metrology with scanning probe microscopes , 1995 .

[44]  F. Gołek,et al.  Morphology of alkali halide thin films studied by AFM , 2006 .

[45]  Osamu Sato,et al.  Nanometric lateral scale development using an atomic force microscope with directly traceable laser interferometers , 2006 .

[46]  Seungbum Hong,et al.  Tribological characteristics of probe tip and PZT media for AFM-based recording technology , 2005, IEEE Transactions on Magnetics.

[47]  Gaoliang Dai,et al.  Nanoscale surface measurements at sidewalls of nano- and micro-structures , 2007 .

[48]  G. Binnig,et al.  Scanning tunneling microscopy-from birth to adolescence , 1987 .

[49]  Thomas Martin Deserno,et al.  Survey: interpolation methods in medical image processing , 1999, IEEE Transactions on Medical Imaging.

[50]  Marco Pisani,et al.  STM carbon nanotube tips fabrication for critical dimension measurements , 2005 .

[51]  Michael T. Postek,et al.  Experimental test of blind tip reconstruction for scanning probe microscopy , 2000 .

[52]  Aristides A. G. Requicha,et al.  Towards automatic nanomanipulation: drift compensation in scanning probe microscopes , 2004, IEEE International Conference on Robotics and Automation, 2004. Proceedings. ICRA '04. 2004.

[53]  J. Bohr,et al.  Contrast artifacts in tapping tip atomic force microscopy , 1998 .

[54]  Francesca Borsetto.  Advanced characterization of micro optical components with atomic force microscopy , 2004 .

[55]  Ndubuisi G. Orji,et al.  Line edge roughness metrology using atomic force microscopes , 2005 .

[56]  Uwe Brand,et al.  A micro-CMM with metrology frame for low uncertainty measurements , 2005 .

[57]  W. Morgenroth,et al.  Downwards to metrology in nanoscale: determination of the AFM tip shape with well-known sharp-edged calibration structures , 2003 .

[58]  S. C. Langford,et al.  Single asperity tribochemical wear of silicon nitride studied by atomic force microscopy , 2002 .

[59]  K. J. Stout,et al.  Three-Dimensional Surface Topography , 2000 .

[60]  R. Thalmann,et al.  Long-range AFM profiler used for accurate pitch measurements , 1998 .

[61]  Heinrich Rohrer,et al.  7 × 7 Reconstruction on Si(111) Resolved in Real Space , 1983 .

[62]  Yanchun Han,et al.  Molecular motions of different scales at thin polystyrene film surface by lateral force microscopy. , 2005, The Journal of chemical physics.

[63]  Kjeld Schaumburg,et al.  Calibration, drift elimination, and molecular structure analysis , 1994 .

[64]  Gerber,et al.  Atomic Force Microscope , 2020, Definitions.

[65]  Dimensional metrology for micro-and nanotechnologies , .

[66]  Harald Bosse,et al.  Comparison of Different Methods of SFM Tip Shape Determination for Various Characterisation Structures and Types of Tip , 2006 .