Research and application of macro/micro dual-drive technology

Macro/micro dual drive techonologhy get broad application in nearby years as it possess the characters such as large travel range,high speed response and high accuracy.this paper sum up common macro and micro orientation components that used in macro/micro dual drive system.Their excellencys and disadvantages are analyzed.Furthermore some common integration modes and fruits in this domain are introduced.this paper provide references to those who are about to engage in this field.