Institute of Physics Publishing Journal of Micromechanics and Microengineering Novel Microfluidic Interconnectors for High Temperature and Pressure Applications

System level simulation results of a planar electrostatic micromotor, based on analytical models of the static and dynamic torque behaviours, are presented. A planar variable capacitance (VC) electrostatic micromotor designed, fabricated and tested at LAAS (Toulouse) in 1995 is simulated using the high level language VHDL–AMS (VHSIC (very high speed integrated circuits) hardware description language–analog mixed signal). The analytical torque model is obtained by first calculating the overlaps and capacitances between different electrodes based on a conformal mapping transformation. Capacitance values in the order of 10−16 F and torque values in the order of 10−11 N m have been calculated in agreement with previous measurements and simulations from this type of motor. A dynamic model has been developed for the motor by calculating the inertia coefficient and estimating the friction-coefficient-based values calculated previously for other similar devices. Starting voltage results obtained from experimental measurement are in good agreement with our proposed simulation model. Simulation results of starting voltage values, step response, switching response and continuous operation of the micromotor, based on the dynamic model of the torque, are also presented. Four VHDL–AMS blocks were created, validated and simulated for power supply, excitation control, micromotor torque creation and micromotor dynamics. These blocks can be considered as the initial phase towards the creation of intellectual property (IP) blocks for microsystems in general and electrostatic micromotors in particular.

[1]  K. J. Gabriel,et al.  Design considerations for a practical electrostatic micro-motor , 1987 .

[2]  Peter Schwarz,et al.  Physically oriented modeling of heterogeneous systems , 2000 .

[3]  Mehran Mehregany,et al.  A rotary electrostatic micromotor 1/spl times/8 optical switch , 1999 .

[4]  J. H. Lang,et al.  Operation of microfabricated harmonic and ordinary side-drive motors , 1990, IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots..

[5]  Stephen F. Bart,et al.  A study of three microfabricated variable-capacitance motors , 1990 .

[6]  Robert L. Mullen,et al.  Electric and fluid field analysis of side-drive micromotors , 1992 .

[7]  Stephen D. Senturia,et al.  Simulation and design of microsystems: a 10-year perspective , 1998 .

[8]  V. Litovski,et al.  Hardware description languages for ALECSIS simulator , 1995, Proceedings of International Conference on Microelectronics.

[9]  D. Damon,et al.  Introduction to VHDL-AMS. 1. Structural and discrete time concepts , 1996, Proceedings of Joint Conference on Control Applications Intelligent Control and Computer Aided Control System Design.

[10]  Fabien Mieyeville,et al.  Behavioral modeling for hierarchical simulation of optronic systems , 1999 .

[11]  Grzegorz Jablonski,et al.  Simulation and Optimization of Variable Capacitance (VC) Micromotors, Using Modified Parallel-Plate Model , 1999 .

[12]  A. J. Sangster,et al.  Determination of the forces present in an electrostatic micromotor , 1993 .

[13]  R. M. Harris,et al.  A CAD architecture for microelectromechanical systems , 1990, IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots..

[14]  Mehran Mehregany,et al.  Micromotor dynamics in lubricating fluids , 1994 .

[15]  Isabelle Dufour,et al.  Optimization of the geometry of electrostatic micromotors using only analytical equations , 1996 .

[16]  Olivier Français,et al.  Simulation of self-control of an electrostatic micromotor for an intravascular echographic system , 1997 .

[17]  Qi Jing,et al.  A hierarchical circuit-level design methodology for microelectromechanical systems , 1999 .

[18]  E. Christen,et al.  Introduction to VHDL-A. 2. Continuous and mixed continuous/discrete concepts , 1996, Proceedings of Joint Conference on Control Applications Intelligent Control and Computer Aided Control System Design.

[19]  A. J. Sangster,et al.  Accuracy assessment of 2-D and 3-D finite-element models of a double-stator electrostatic wobble motor , 1997 .

[20]  R. Muller,et al.  IC-processed micro-motors: design, technology, and testing , 1989, IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'.

[21]  Gerhard Wachutka,et al.  Microfluidic system modeling using VHDL-AMS and circuit simulation , 1998 .

[22]  Eduard Moser,et al.  VHDL-AMS: the missing link in system design. Experiments with unified modelling in automotive engineering , 1998, Proceedings Design, Automation and Test in Europe.

[23]  Mehran Mehregany,et al.  An experimental technique and a model for studying the operation of harmonic side-drive micrometers , 1993 .

[24]  Ernst Christen,et al.  Vhdl-ams---a hardware description language for analog and mixed-signal applications , 1999 .

[25]  R. Reuben,et al.  Frictional study of micromotor bearings , 1997 .

[26]  J. Lang,et al.  Electric micromotor dynamics , 1992 .

[27]  Bartlomiej F. Romanowicz.  Methodology for the Modeling and Simulation of Microsystems , 1998 .

[28]  N. Fabre,et al.  First steps towards the fabrication of electrostatic micromotors using SOG , 1995 .

[29]  S. Crary,et al.  CAEMEMS: an integrated computer-aided engineering workbench for micro-electro-mechanical systems , 1990, IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots..

[30]  Mehran Mehregany,et al.  High-aspect-ratio rotary polygon micromotor scanners , 1999 .

[31]  Marc P.Y. Desmulliez,et al.  System level simulation of a double stator wobble electrostatic micromotor , 2002 .

[32]  P. Di Barba,et al.  3-D computer aided analysis of the "Berkeley" electrostatic micromotor , 1995 .

[33]  T. Streit,et al.  A ROTARY ELECTROSTATIC MICROMOTOR OPTICAL SWITCH , 1998 .

[34]  William S. Trimmer.  Section 2: Side Drive Actuators , 1997 .

[35]  Maher,et al.  Energy-Based Characterization of Microelectromechanical Systems (MEMS) and Component Modeling Using VHDL-AMS , 1999 .

[36]  Robert Lewis Reuben,et al.  Coupled electrostatic and mechanical FEA of a micromotor , 1994 .