Collimation testing of the wavefront of interferometer by scanning cube corner retro-reflector method

The wavefront collimation of the optical interferometric systems must be controlled strictly. A scanning cube corner retro-reflector is introduced to divide the wavefront of the interferometer into a series of sub-wavefronts. The tilt angles of all the sub-wavefronts are obtained to reconstruct the tested wavefront thus the collimation test of the wavefront can be realized. The wavefront in the horizontal direction of a 100mm aperture interferometer is tested and reconstructed. The PV and RMS value of the collimated wavefront are 0.629λ and 0.130λ. The effect of system error on the experimental results is analyzed. The experimental results show that this method is of low cost and high accuracy, and is particularly applicable to the collimation test of a large aperture wavefront.

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