The fairy world of quartz vibrating MEMS

Quartz crystal has been an essential material for time and frequency and radio-frequency applications during the 20th century. Quartz is always an unmatched material at the beginning of the 21st century, and hold 80 % of oscillators & RF market which represent today 17 billions market with a 10 % growth per year. This paper describes other more confidential applications - the vibrating inertial MEMS - where the quartz crystal plays also a major role. Clearly, quartz crystal has still a future in these high added value applications, and for a long time.

[1]  C. S. Lam,et al.  A review of the recent development of MEMS and crystal oscillators and their impacts on the frequency control products industry , 2008, 2008 IEEE Ultrasonics Symposium.

[2]  L. Pinard,et al.  A micro-resonator for fundamental physics experiments and its possible interest for time and frequency applications , 2011, 2011 Joint Conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS) Proceedings.

[3]  D. Janiaud,et al.  Monolithic differential vibrating beam accelerometer within an isolating system between the two resonators , 2005, IEEE Sensors, 2005..

[4]  Hamid Kokabi,et al.  Closed-loop compensation of the cross-coupling error in a quartz Coriolis Vibrating Gyro , 2012 .

[5]  Masako Tanaka,et al.  An overview of quartz MEMS devices , 2010, 2010 IEEE International Frequency Control Symposium.

[6]  D. Janiaud,et al.  The VIA vibrating beam accelerometer: a new quartz micromachined sensor , 1999, Proceedings of the 1999 Joint Meeting of the European Frequency and Time Forum and the IEEE International Frequency Control Symposium (Cat. No.99CH36313).

[7]  David T. Chang,et al.  Optimized DRIE etching of ultra-small quartz resonators , 2003, IEEE International Frequency Control Symposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, 2003. Proceedings of the 2003.

[8]  Serge Muller,et al.  Performance Evaluation of the VIA Accelerometer , 1998 .

[9]  A.M. Madni,et al.  Advances in Ruggedized Quartz MEMS Inertial Measurement Units , 2006, 2006 IEEE/ION Position, Location, And Navigation Symposium.

[10]  O. Le Traon,et al.  The DIVA Accelerometer and VIG Gyro: Two Quartz Inertial MEMS for Guidance and Navigation Applications , 2007 .

[11]  P. Bouniol,et al.  The VIA vibrating beam accelerometer: concept and performance , 1998, IEEE 1998 Position Location and Navigation Symposium (Cat. No.98CH36153).

[12]  O. Le Traon,et al.  A micropillar for cavity optomechanics , 2011, 1107.3828.

[13]  Clarence Zener,et al.  Internal friction in solids , 1940 .

[14]  Yong-Kweon Kim,et al.  Silicon/quartz bonding and quartz deep RIE for the fabrication of quartz resonator structures , 2008, 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems.

[15]  L. Pinard,et al.  A micromechanical resonator to reach the quantum regime , 2010, 2010 IEEE Sensors.

[16]  D. Janiaud,et al.  A New Quartz Monolithic Differential Vibrating Beam Accelerometer , 2006, 2006 IEEE/ION Position, Location, And Navigation Symposium.

[17]  J. Golinval,et al.  THERMOELASTIC DAMPING IN VIBRATING BEAM ACCELEROMETER: A NEW THERMOELASTIC FINITE ELEMENT APPROACH , 2006 .