论文信息 - 111) Faceted Ceria and Its Influence on STI CMP for Memory Devices Below 50 nm - 字舞流文

111) Faceted Ceria and Its Influence on STI CMP for Memory Devices Below 50 nm

U. Paik | M. Naito | A. Watanabe | Jong-woo Kim | Ye-Hwan Kim