Pre space transformer and space transformer manufactured by the pre space transformer, and apparatus for inspecting semiconductor device with the space transformer

The present invention relates to a pre space transformer. A pre space transformer according to the embodiment of the present invention includes a substrate which has one surface and another surface which is opposite to the one surface, individual electrodes which are arranged on the one surface, and a common electrode which is arranged in the substrate. The individual electrodes form a unit pattern and are repeatedly arranged.